Zhang Luran, Gao Dandan, Liu Huan, Xie Jiyang, Hu Wanbiao
School of Materials Science and Engineering, Yunnan University, Kunming 650091, China.
Materials (Basel). 2019 Jul 22;12(14):2328. doi: 10.3390/ma12142328.
A series of FeCoN films were successfully deposited on glass substrates in a magnetron sputtering system. Using oblique incidence method and FeCoN/Ru/FeCoN synthetic antiferromagnetic (SAF) structure, two additional anisotropies energy were introduced: oblique incidence anisotropy and exchange anisotropy energy, which marked enhancement of the effective magnetic anisotropy (Hk). The increment of Hk results in a significant improvement in the roll-off frequency of these films. The roll-off frequency of FeCoN/Ru/FeCoN films with SAF structure can reach up to 8.6 GHz. A feasible approach to conveniently controlling Hk of soft magnetic thin films by using oblique deposition and SAF structure can further improve their properties for the potential applications in the high frequency region.
一系列FeCoN薄膜在磁控溅射系统中成功沉积在玻璃衬底上。采用斜入射法和FeCoN/Ru/FeCoN合成反铁磁(SAF)结构,引入了另外两种各向异性能量:斜入射各向异性和交换各向异性能量,这显著增强了有效磁各向异性(Hk)。Hk的增加导致这些薄膜的滚降频率有显著提高。具有SAF结构的FeCoN/Ru/FeCoN薄膜的滚降频率可达8.6GHz。利用斜沉积和SAF结构方便地控制软磁薄膜Hk的可行方法,可以进一步改善其性能,以用于高频区域的潜在应用。