基于微机电系统的颗粒物空气微流分级芯片的设计与分析
Design and Analysis of Particulate Matter Air-Microfluidic Grading Chip Based on MEMS.
作者信息
Chen Tingting, Sun Jianhai, Ma Tianjun, Li Tong, Liu Chang, Zhu Xiaofeng, Xue Ning
机构信息
School of Electronic, Electrical, and Communication Engineering, University of Chinese Academy of Science (UCAS), Beijing 100190, China.
State key laboratory of transducer technology, Institute of Electronics, Chinese Academy of Science, Beijing 100190, China.
出版信息
Micromachines (Basel). 2019 Jul 26;10(8):497. doi: 10.3390/mi10080497.
Atmospheric particulate matter (PM) air-microfluidic grading chip is the premise for realizing high-precision PM online monitoring. It can be used as an indispensable basis for identifying pollution sources and controlling inhalable harmful substances. In this paper, based on aerodynamic theory and COMSOL numerical analysis, a two-stage PM air-microfluidic grading chip with cut-off diameters of 10 μm and 2.5 μm was designed. The effects of chip inlet width (), main flow width (), second channel width (), and split ratio (/) on PM classification efficiency were analyzed, and optimized design parameters were achieved. The collection efficiency curves were plotted according to PM separation effects of the chip on various particle sizes (0.5-15 μm). The results indicate that the chip has good separation effect, which provides an efficient structural model for the PM micro-fluidization chip design.
大气颗粒物（PM）空气微流分级芯片是实现高精度PM在线监测的前提。它可作为识别污染源和控制可吸入有害物质的不可或缺的依据。本文基于空气动力学理论和COMSOL数值分析，设计了一种截止直径为10μm和2.5μm的两级PM空气微流分级芯片。分析了芯片入口宽度（）、主流宽度（）、第二通道宽度（）和分流比（/）对PM分类效率的影响，并获得了优化的设计参数。根据芯片对各种粒径（0.5 - 15μm）的PM分离效果绘制了收集效率曲线。结果表明，该芯片具有良好的分离效果，为PM微流化芯片设计提供了一种高效的结构模型。
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