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通过丝网转印在薄膜基板上同时制备“有线正面和背面超薄压阻硅芯片”

Fabrication of Simultaneously Implementing "Wired Face-Up and Face-Down Ultrathin Piezoresistive Si Chips" on a Film Substrate by Screen-Offset Printing.

作者信息

Takei Yusuke, Nomura Ken-Ichi, Horii Yoshinori, Zymelka Daniel, Ushijima Hirobumi, Kobayashi Takeshi

机构信息

Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8564, Japan.

出版信息

Micromachines (Basel). 2019 Aug 26;10(9):563. doi: 10.3390/mi10090563.

DOI:10.3390/mi10090563
PMID:31454906
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6780128/
Abstract

We realized the implementation of an ultrathin piezoresistive Si chip and stretchable printed wires on a flexible film substrate using simple screen-offset printing technology. This process does not require a special MEMS fabrication equipment and is applicable to face-up chips where electrodes are formed on the top surface of the chip, as well as to face-down chips where electrodes are formed on the bottom surface of the chip. This fabrication process is quite useful in the field of flexible hybrid electronics (FHE) as a method for mounting and wiring electronic components on a flexible substrate. In this study, we confirmed that face-up and face-down chips could be mounted on polyimide film tape. Furthermore, it was confirmed that the two types of chips could be simultaneously mounted even if they exist on the same substrate. Five-μm-thick piezoresistive Si chips were transferred and wired on a polyimide film tape using screen-offset printing, and a band-plaster type blood pulse sensor was fabricated. Moreover, we successfully demonstrated that the blood pulse could be measured with neck, inner elbow, wrist, and ankle.

摘要

我们利用简单的丝网胶版印刷技术，在柔性薄膜基板上实现了超薄压阻硅芯片和可拉伸印刷线路的制作。该工艺不需要特殊的微机电系统制造设备，适用于电极在芯片顶面形成的正面芯片，以及电极在芯片底面形成的背面芯片。作为在柔性基板上安装和连接电子元件的一种方法，这种制造工艺在柔性混合电子（FHE）领域非常有用。在本研究中，我们证实了正面和背面芯片都可以安装在聚酰亚胺薄膜胶带上。此外，还证实了即使两种芯片存在于同一基板上，也可以同时进行安装。使用丝网胶版印刷将5μm厚的压阻硅芯片转移并连接到聚酰亚胺薄膜胶带上，制作出了创可贴型血液脉搏传感器。此外，我们成功地证明了可以在颈部、肘内侧、手腕和脚踝处测量血液脉搏。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/4c003bdb6041/micromachines-10-00563-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/080cbb25e1a3/micromachines-10-00563-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/c9a1daccf436/micromachines-10-00563-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/db0027c7bd3c/micromachines-10-00563-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/732a7e24f66f/micromachines-10-00563-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/80755d65f77c/micromachines-10-00563-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/a46f69b4e377/micromachines-10-00563-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/39fba4caa61c/micromachines-10-00563-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/4c003bdb6041/micromachines-10-00563-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/080cbb25e1a3/micromachines-10-00563-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/c9a1daccf436/micromachines-10-00563-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/db0027c7bd3c/micromachines-10-00563-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/732a7e24f66f/micromachines-10-00563-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/80755d65f77c/micromachines-10-00563-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/a46f69b4e377/micromachines-10-00563-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/39fba4caa61c/micromachines-10-00563-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/70bc/6780128/4c003bdb6041/micromachines-10-00563-g008.jpg

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本文引用的文献

1
Soft Material-Enabled, Flexible Hybrid Electronics for Medicine, Healthcare, and Human-Machine Interfaces.用于医学、医疗保健和人机接口的基于软材料的柔性混合电子器件。
Materials (Basel). 2018 Jan 24;11(2):187. doi: 10.3390/ma11020187.
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Fabrication of a Textile-Based Wearable Blood Leakage Sensor Using Screen-Offset Printing.采用网版印刷技术制备纺织基可穿戴式血液渗漏传感器
Sensors (Basel). 2018 Jan 15;18(1):240. doi: 10.3390/s18010240.
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Simultaneous Roll Transfer and Interconnection of Flexible Silicon NAND Flash Memory.同时进行的柔性硅 NAND 闪存的卷带转移和互连。
Adv Mater. 2016 Oct;28(38):8371-8378. doi: 10.1002/adma.201602339. Epub 2016 Jul 20.
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A flexible proximity sensor formed by duplex screen/screen-offset printing and its application to non-contact detection of human breathing.一种通过双面丝网/丝网胶版印刷形成的柔性接近传感器及其在人体呼吸非接触检测中的应用。
Sci Rep. 2016 Jan 22;6:19947. doi: 10.1038/srep19947.