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用于压阻式应变传感的可拉伸聚二甲基硅氧烷-银基底电极结构上的喷墨沉积单壁碳纳米管微图案

Inkjet-Deposited Single-Wall Carbon Nanotube Micropatterns on Stretchable PDMS-Ag Substrate-Electrode Structures for Piezoresistive Strain Sensing.

作者信息

Ervasti Henri, Järvinen Topias, Pitkänen Olli, Bozó Éva, Hiitola-Keinänen Johanna, Huttunen Olli-Heikki, Hiltunen Jussi, Kordas Krisztian

机构信息

Microelectronics Research Unit, University of Oulu, Erkki Koiso-Kanttilan Katu 3, FIN-90570 Oulu, Finland.

VTT Technical Research Centre of Finland, Kaitoväylä 1, FIN-90590 Oulu, Finland.

出版信息

ACS Appl Mater Interfaces. 2021 Jun 16;13(23):27284-27294. doi: 10.1021/acsami.1c04397. Epub 2021 Jun 2.

Abstract

Printed piezoresistive strain sensors based on stretchable roll-to-roll screen-printed silver electrodes on polydimethylsiloxane substrates and inkjet-deposited single-wall carbon nanotube micropatterns are demonstrated in this work. With the optimization of surface wetting and inkjet printing parameters, well-defined microscopic line patterns of the nanotubes with a sheet resistance of <100 Ω/□ could be deposited between stretchable Ag electrodes on the plasma-treated substrate. The developed stretchable devices are highly sensitive to tensile strain with a gauge factor of up to 400 and a pressure sensitivity of ∼0.09 Pa, respond to bending down to a radius of 1.5 mm, and are suitable for mounting on the skin to monitor and resolve various movements of the human body such as cardiac cycle, breathing, and finger flexing. This study indicates that inkjet deposition of nanomaterials can complement well other printing technologies to produce flexible and stretchable devices in a versatile manner.

摘要

本文展示了基于在聚二甲基硅氧烷基体上通过可拉伸卷对卷丝网印刷银电极以及喷墨沉积单壁碳纳米管微图案制备的印刷压阻应变传感器。通过优化表面润湿性和喷墨印刷参数,可在经等离子体处理的基体上的可拉伸银电极之间沉积具有明确微观线条图案、方阻<100 Ω/□的纳米管。所开发的可拉伸器件对拉伸应变高度敏感,应变计因子高达400,压力灵敏度约为0.09 Pa,可响应低至1.5 mm半径的弯曲,适用于安装在皮肤上以监测和解析人体的各种运动,如心动周期、呼吸和手指弯曲。这项研究表明,纳米材料的喷墨沉积可以很好地补充其他印刷技术,以通用的方式生产柔性和可拉伸器件。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b8ae/8289179/5c28e5e63408/am1c04397_0002.jpg

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