State Grid Shanghai Electric Power Research Institute, Shanghai 200437, China.
Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi'an 710072, China.
Sensors (Basel). 2019 Aug 26;19(17):3696. doi: 10.3390/s19173696.
Sound sensing finds wide applications in various fields, such as underwater detection, structural health monitoring, and medical diagnosis, to name just a few. Based on our previously developed MEMS-on-fiber sensors, showing the advantages of low cost, small volume, and high performance, a three-dimensional ultrasonic localization system employing four such sensors was established in this work. A time difference of arrival (TDOA) algorithm was utilized to analyze the acquired data and then calculate the accurate position of the ultrasonic signal source. Plenty of practical measurements were performed, and the derived localization deviation in the region of 2 m × 2 m × 1 m was about 2-5 mm. Outside this region, the deviation tended to increase due to the directional sensitivity existing in these sensors. As a result, for a more accurate localization requirement, more sensing probes are needed in order to depict a completely suitable application situation for MEMS technology.
声传感在各个领域都有广泛的应用，如水下探测、结构健康监测和医疗诊断等。基于我们之前开发的基于 MEMS 的光纤传感器，该传感器具有低成本、小体积和高性能的优点，本工作建立了一个采用四个这种传感器的三维超声定位系统。利用到达时间差（TDOA）算法对采集的数据进行分析，然后计算超声信号源的精确位置。进行了大量的实际测量，在 2 m×2 m×1 m 的区域内得出的定位偏差约为 2-5 毫米。在该区域之外，由于这些传感器存在方向灵敏度，偏差会增大。因此，对于更精确的定位要求，需要更多的传感探头，以便为 MEMS 技术描绘一个完全合适的应用场景。
