低成本、高性能光纤法布里-珀罗超声传感器。

Low-Cost, High-Performance Fiber Optic Fabry⁻Perot Sensor for Ultrasonic Wave Detection.

机构信息

Key Laboratory of Micro/Nano Systems for Aerospace (Ministry of Education), Northwestern Polytechnical University, Xi'an 710072, China.

Key Laboratory of Micro- and Nano-Electro-Mechanical Systems of Shaanxi Province, Northwestern Polytechnical University, Xi'an 710072, China.

出版信息

Sensors (Basel). 2019 Jan 19;19(2):406. doi: 10.3390/s19020406.

DOI:10.3390/s19020406

PMID:30669494

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6359033/

Abstract

This study describes a novel fiber optic extrinsic Fabry⁻Perot interferometric (EFPI) ultrasonic sensor comprising a low-cost and high-performance silicon diaphragm. A vibrating diaphragm, 5 μm thick, was fabricated by using the Microelectromechanical Systems (MEMS) processing technology on a silicon-on-insulator (SOI) wafer. The Fabry⁻Perot (FP) cavity length was solely determined during the manufacturing process of the diaphragm by defining a specific stepped hole on the handling layer of the SOI wafer, which made the assembly of the sensor easier. In addition, the use of cheap and commercially available components and MEMS processing technology in the development of the sensing system, limited the cost of the sensor. The experimental tests showed that the minimum detectable ultrasonic pressure was 1.5 mPa/sqrt(Hz) ⁻0.625 mPa/sqrt(Hz) between 20 kHz and 40 kHz. As a result, this sensor has the potential to successfully detect weak ultrasonic signals.

摘要

本研究描述了一种新颖的光纤外差 Fabry-Perot 干涉（EFPI）超声传感器，包含一个低成本、高性能的硅膜片。通过在绝缘体上硅（SOI）晶片的处理层上定义特定的阶梯孔，利用微机电系统（MEMS）加工技术制造出了厚度为 5μm 的振动膜片，从而唯一地确定了 Fabry-Perot（FP）腔的长度，这使得传感器的组装更加容易。此外，在传感系统的开发中使用廉价且市售的组件和 MEMS 加工技术，限制了传感器的成本。实验测试表明，在 20 kHz 至 40 kHz 之间，最小可检测超声压力为 1.5 mPa/√（Hz） ⁻ 0.625 mPa/√（Hz）。因此，该传感器具有成功检测微弱超声信号的潜力。