在绝缘体上铌酸锂衬底上制备具有可控楔角的高品质因子晶体微谐振器。

Fabrication of Crystalline Microresonators of High Quality Factors with a Controllable Wedge Angle on Lithium Niobate on Insulator.

作者信息

Zhang Jianhao, Fang Zhiwei, Lin Jintian, Zhou Junxia, Wang Min, Wu Rongbo, Gao Renhong, Cheng Ya

机构信息

State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Nanomaterials (Basel). 2019 Aug 29;9(9):1218. doi: 10.3390/nano9091218.

DOI:10.3390/nano9091218

PMID:31470545

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC6780164/

Abstract

We report the fabrication of crystalline microresonators of high quality (Q) factors with a controllable wedge angle on lithium niobate on insulator (LNOI). Our technique relies on a femtosecond laser assisted chemo-mechanical polish, which allows us to achieve ultrahigh surface smoothness as critically demanded by high Q microresonator applications. We show that by refining the polish parameters, Q factors as high as 4.7 × 10 can be obtained and the wedge angle of the LNOI can be continuously tuned from 9° to 51°.

摘要

我们报告了在绝缘体上铌酸锂（LNOI）上制造具有可控楔角的高品质（Q）因子晶体微谐振器的方法。我们的技术依赖于飞秒激光辅助化学机械抛光，这使我们能够实现高Q微谐振器应用所严格要求的超高表面平整度。我们表明，通过优化抛光参数，可以获得高达4.7×10的Q因子，并且LNOI的楔角可以从9°连续调谐到51°。