School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100010, China.
Sensors (Basel). 2019 Sep 13;19(18):3953. doi: 10.3390/s19183953.
This paper presents microelectromechanical system (MEMS)-based electrochemical seismometers with two pairs of electrodes integrated on one chip. Both theoretical analysis and numerical simulations were conducted to reveal the working principle of the proposed electrochemical seismometers, finding that flow holes distributed on cathodes rather than anodes can produce significantly higher sensitivities. The proposed electrochemical seismometers were fabricated based on conventional micromachined processes with high fabrication repeatability. Sensitivity measurements of the proposed seismometers and their commercial counterpart of CME6011 were conducted, indicating the sensitivities of the proposed seismometer with flow holes on cathodes were two orders higher than the counterpart with flow holes on anodes and one order higher than CME6011 at dominant frequencies. Measurements of random ground motions based on the proposed seismometer with flow holes on cathodes and CME6011 were conducted, producing comparable noise levels without observable ground motions and high correlations in response to random events of ground motions. These results validated the functionality of the proposed electrochemical seismometers, which may contribute to seismic monitoring in the near future.
本文提出了一种基于微机电系统（MEMS）的电化学地震仪，该地震仪在一个芯片上集成了两对电极。通过理论分析和数值模拟揭示了所提出的电化学地震仪的工作原理，发现分布在阴极而不是阳极的流孔可以产生更高的灵敏度。所提出的电化学地震仪是基于传统的微加工工艺制造的，具有很高的制造重复性。对所提出的地震仪及其商用 CME6011 的灵敏度进行了测量，结果表明，带有阴极流孔的地震仪的灵敏度比带有阳极流孔的同类产品高两个数量级，比 CME6011 高一个数量级，在主要频率下。基于带有阴极流孔的地震仪和 CME6011 对随机地面运动进行了测量，在没有可观测到的地面运动的情况下产生了可比的噪声水平，并且对地面运动的随机事件具有高度相关性。这些结果验证了所提出的电化学地震仪的功能，这可能有助于未来的地震监测。
