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基于微机电系统的依赖于电容式加速度计集成三电极结构的电化学地震仪。

MEMS-Based Electrochemical Seismometer Relying on a CAC Integrated Three-Electrode Structure.

作者信息

She Xu, Wang Junbo, Chen Deyong, Chen Jian, Xu Chao, Qi Wenjie, Liu Bowen, Liang Tian

机构信息

State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2021 Jan 26;21(3):809. doi: 10.3390/s21030809.

DOI:10.3390/s21030809
PMID:33530375
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7865234/
Abstract

This study developed a MEMS-based electrochemical seismometer relying on a cathode-anode-cathode (CAC) integrated three-electrode structure where two cathodes were positioned on two surfaces of a silicon wafer, while one anode was positioned on the sidewalls of the through holes of the silicon wafer. Device design and numerical simulations were conducted to model the functionality of the three-electrode structure in detecting vibration signals with the key geometrical parameters optimized. The CAC integrated three-electrode structure was then manufactured by microfabrication, which demonstrated a simplified fabrication process in comparison with conventional four-electrode structures. Device characterization shows that the sensitivity of the CAC microseismometer was an order of magnitude higher than that of the CME6011 (a commercially available four-electrode electrochemical seismometer), while the noise level was comparable. Furthermore, in response to random vibrations, a high correlation coefficient between the CAC and the CME6011 (0.985) was located, validating the performance of the developed seismometer. Thus, the developed electrochemical microseismometer based on an integrated three-electrode structure may provide a new perspective in seismic observations and resource explorations.

摘要

本研究开发了一种基于微机电系统（MEMS）的电化学地震仪，该地震仪采用阴极-阳极-阴极（CAC）集成三电极结构，其中两个阴极位于硅片的两个表面，而一个阳极位于硅片通孔的侧壁。进行了器件设计和数值模拟，以对三电极结构检测振动信号的功能进行建模，并优化了关键几何参数。然后通过微加工制造了CAC集成三电极结构，与传统的四电极结构相比，该结构展示了简化的制造工艺。器件表征表明，CAC微地震仪的灵敏度比CME6011（一种市售的四电极电化学地震仪）高一个数量级，而噪声水平相当。此外，在随机振动响应方面，CAC与CME6011之间的相关系数较高（0.985），验证了所开发地震仪的性能。因此，所开发的基于集成三电极结构的电化学微地震仪可能为地震观测和资源勘探提供新的视角。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/fc82a0ab8c58/sensors-21-00809-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/6f914e01e2f1/sensors-21-00809-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/ecd009904db2/sensors-21-00809-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/5038e3a20862/sensors-21-00809-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/da7c603ff603/sensors-21-00809-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/c7b2fbc64057/sensors-21-00809-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/e5ec45cba079/sensors-21-00809-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/f564e45c9aa1/sensors-21-00809-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/fc82a0ab8c58/sensors-21-00809-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/6f914e01e2f1/sensors-21-00809-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/ecd009904db2/sensors-21-00809-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/5038e3a20862/sensors-21-00809-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/da7c603ff603/sensors-21-00809-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/c7b2fbc64057/sensors-21-00809-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/e5ec45cba079/sensors-21-00809-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/f564e45c9aa1/sensors-21-00809-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e562/7865234/fc82a0ab8c58/sensors-21-00809-g008.jpg

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本文引用的文献

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Molecular electric transducers as motion sensors: a review.分子电换能器作为运动传感器：综述。
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