Duan Yumo, Zhong Anxiang, Lu Yulan, Chen Jian, Chen Deyong, Wang Junbo
State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.
School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Micromachines (Basel). 2022 Feb 23;13(3):354. doi: 10.3390/mi13030354.
This paper presented an electrochemical seismic micro sensor based on an integrated structure of four centrosymmetric electrodes. In this integrative structure, cathodes were not only distributed on wafer surfaces but also on the inner walls of the flow holes of the wafer, which increased the effective cathode areas and improved the sensitivity of the sensor. Numerical simulations were conducted to validate the feasibility of the integrated structure of four centrosymmetric electrodes in monitoring seismic vibrations where variations in the arrangements of the flow holes and anode width were investigated. The integrated structure of the four centrosymmetric micro electrodes was fabricated based on Micro-Electro-Mechanical Systems (MEMS) without the requirement of manual alignments. Experimental characterizations revealed that: (1) the maximum sensitivity of the electrochemical seismic sensor based on the integrated structure of four centrosymmetric electrodes was two orders of magnitude higher than that of the commercial counterpart of CME6011 and three times higher than the electrochemical seismic sensor based on the integrated structure of four planar micro electrodes; (2) the electrochemical seismic sensor based on the integrated structure of four centrosymmetric micro electrodes demonstrated comparable and even lower noise levels in comparison to CME6011. Thus, the electrochemical seismic micro sensor developed in this study may function as an enabling tool in future applications of seismic monitoring and geophysical explorations.
本文提出了一种基于四个中心对称电极集成结构的电化学地震微传感器。在这种集成结构中，阴极不仅分布在晶圆表面，还分布在晶圆流孔的内壁上，这增加了有效阴极面积，提高了传感器的灵敏度。进行了数值模拟，以验证四个中心对称电极的集成结构在监测地震振动方面的可行性，研究了流孔布置和阳极宽度的变化。基于微机电系统（MEMS）制造了四个中心对称微电极的集成结构，无需手动对准。实验表征表明：（1）基于四个中心对称电极集成结构的电化学地震传感器的最大灵敏度比商业同类产品CME6011高两个数量级，比基于四个平面微电极集成结构的电化学地震传感器高三倍；（2）与CME6011相比，基于四个中心对称微电极集成结构的电化学地震传感器表现出相当甚至更低的噪声水平。因此，本研究开发的电化学地震微传感器可能成为未来地震监测和地球物理勘探应用中的一种有效工具。
