HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto, Mexico.
Sensors (Basel). 2011;11(8):7710-23. doi: 10.3390/s110807710. Epub 2011 Aug 5.
The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in which small displacement measurements are employed requires the use of online measurements, high speed processes, open architecture control systems, as well as good adaptability to specific process conditions. The main contribution of this work is the development of a smart sensor for large displacement measurement based on phase measurement which achieves high accuracy and resolution, designed to be used with a commercial heterodyne interferometer. The system is based on a low-cost Field Programmable Gate Array (FPGA) allowing the integration of several functions in a single portable device. This system is optimal for high speed applications where online measurement is needed and the reconfigurability feature allows the addition of different modules for error compensation, as might be required by a specific application.
在纳米尺度上测量小位移需要高精度和高精密的计量系统。在这种情况下，基于干涉仪的位移测量已经成为用于可追溯尺寸计量的主要工具。在不同的工业应用中，小位移测量需要采用在线测量、高速过程、开放式架构控制系统，以及对特定工艺条件的良好适应性。这项工作的主要贡献是开发了一种基于相位测量的智能传感器，用于大位移测量，该传感器具有高精度和高分辨率，旨在与商业外差干涉仪一起使用。该系统基于低成本现场可编程门阵列（FPGA），允许在单个便携式设备中集成多个功能。该系统非常适合需要在线测量的高速应用，并且可重构特性允许添加不同的模块来进行误差补偿，这可能是特定应用所需要的。
