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基于可编程、无需电铸的 TiO/TaO 异质结的非易失性存储器件。

Programmable, electroforming-free TiO/TaO heterojunction-based non-volatile memory devices.

机构信息

WATLab and Department of Chemistry, University of Waterloo, 200 University Ave. W., Waterloo, Ontario N2L 3G1, Canada.

出版信息

Nanoscale. 2019 Oct 10;11(39):18159-18168. doi: 10.1039/c9nr06403f.

Abstract

Electroforming-free resistive switching in memristors is essential to reliably achieving the performance of high switching speed, high endurance, good signal retention, and low power consumption expected for next-generation computing devices. Although there have been various approaches to resolve the issues observed with the electroforming process in oxide-based memory devices, most of them end up having high SET and RESET voltages and short lifetimes. We present a heterojunction interface of oxygen-vacancy-defect-rich ultrananocrystalline TiOx and TaOx films used as the switching matrix, which enables high-quality electroforming-free switching with a much lower programming voltage (+0.5-0.8 V), a high endurance of over 104 cycles and good retention performance with an estimated device lifetime of over 10 years. The electroforming-free switching behavior is governed by migration of oxygen vacancies driven by electric field localization that is imposed by the ultrananocrystalline nature of the TaOx film, serving as the switching matrix, with the TiOx film serving as an additional oxygen vacancy source to reduce the overall resistivity of TaOx and provide low-bias rectification. The ability to perform electroforming-free resistive switching along with excellent switching repeatability and retention capabilities for various digital and analog programmable voltages enables high scalability and large density integration of the cross-bar ReRAM framework.

摘要

无电铸阻变在忆阻器中至关重要,对于可靠实现下一代计算设备所需的高速开关、高耐久性、良好信号保持和低功耗性能至关重要。尽管已经有多种方法来解决基于氧化物的存储器件中电铸过程中观察到的问题,但其中大多数方法最终会导致高 SET 和 RESET 电压和短寿命。我们提出了一种富氧空位缺陷的氧空位缺陷的异质结界面 ultrananocrystalline TiOx 和 TaOx 薄膜用作开关矩阵,可实现高质量的无电铸开关,编程电压低得多(+0.5-0.8 V),耐久性超过 104 次循环,保持性能良好,预计器件寿命超过 10 年。无电铸开关行为由电场定位驱动的氧空位迁移控制,电场定位由 TaOx 薄膜的 ultrananocrystalline 性质引起,作为开关矩阵,TiOx 薄膜作为额外的氧空位源,降低 TaOx 的整体电阻率并提供低偏置整流。能够执行无电铸阻变,以及各种数字和模拟可编程电压的出色开关可重复性和保持能力,使交叉棒 ReRAM 框架具有高可扩展性和高密度集成能力。

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