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基于希尔伯特相位细分的频率扫描干涉法绝对距离测量。

Absolute Distance Measurement Using Frequency-Scanning Interferometry Based on Hilbert Phase Subdivision.

机构信息

University of Chinese Academy of Sciences, Beijing 100049, China.

Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

出版信息

Sensors (Basel). 2019 Nov 23;19(23):5132. doi: 10.3390/s19235132.

Abstract

In order to eliminate the influence of laser frequency nonlinearity, the frequency-scanning interferometry (FSI) often uses the beat signal of an auxiliary interferometer as the external clock. The time points at every amplitude peaks and bottoms of the auxiliary beat signal are selected as the sampling time points for the main interferometer signal. To satisfy the Nyquist sampling requirement, the optical path difference (OPD) of the delay fiber in auxiliary interferometer should be at least twice longer than the measurement distance. In this paper, we proposed a method to shorten the length of delay fiber. The Hilbert transform was used to extract the phase of the auxiliary interference signal and calculate the time points corresponding to subdivided phase intervals. Then, the main interference signal was resampled at these moments, and the fast Fourier transform was performed on the resampled signal. The experimental results showed that the target at the distance of about 5 m was measured when the OPD of the auxiliary interferometer was about 4.5 m. The standard deviation of the distance measurement results could reach 4.64 μm.

摘要

为了消除激光频率非线性的影响,频扫干涉测量(FSI)通常采用辅助干涉仪的拍频信号作为外时钟。在辅助拍频信号的每个幅度峰值和谷底处选择时间点作为主干涉仪信号的采样时间点。为了满足奈奎斯特采样要求,辅助干涉仪中延迟光纤的光程差(OPD)至少应比测量距离长两倍。本文提出了一种缩短延迟光纤长度的方法。通过希尔伯特变换提取辅助干涉信号的相位,并计算出对应细分相位区间的时间点。然后,在这些时刻对主干涉信号进行重采样,并对重采样信号进行快速傅里叶变换。实验结果表明,当辅助干涉仪的光程差约为 4.5m 时,可测量约 5m 距离处的目标。距离测量结果的标准差可达到 4.64μm。

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