Kang Yongfeng, Hu Hangfeng, Zhao Jingyi
Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an, 710049, People's Republic of China.
Key Laboratory for Physical Electronics and Devices of the Ministry of Education, School of Electronic Science and Engineering, Xi'an Jiaotong University, Xi'an, 710049, People's Republic of China.
Ultramicroscopy. 2020 Mar;210:112924. doi: 10.1016/j.ultramic.2019.112924. Epub 2019 Dec 30.
In this paper, a novel scheme based on the differential algebraic (DA) method is proposed to analyze the electron optics properties of the Wien filters. A new software package is then developed, to compute the geometrical and chromatic aberrations up to the fifth order of the Wien filters. For examples, the aberrations of single filter and the double filters are calculated. The calculated geometrical aberration coefficients are comparable with the counterpart calculated by Tang's theory. However, both theories can only match with each other in the calculation of the chromatic aberration coefficient when the dispersion ray is taken into consideration in Tang's theory.
