Kim Byeong Jo, Kwon Seung Lee, Kim Min-Cheol, Jin Young Un, Lee Dong Geon, Jeon Jae Bum, Yun Yeonghun, Choi Mansoo, Boschloo Gerrit, Lee Sangwook, Jung Hyun Suk
School of Advanced Materials Science & Engineering , Sungkyunkwan University , Suwon 16419 , Republic of Korea.
Department of Chemistry-Ångström Laboratory, Physical Chemistry , Uppsala University , Box 523, SE 751 20 Uppsala , Sweden.
ACS Appl Mater Interfaces. 2020 Feb 12;12(6):7125-7134. doi: 10.1021/acsami.9b19030. Epub 2020 Jan 30.
Perovskite solar cells (PSCs), which have surprisingly emerged in recent years, are now aiming at commercialization. Rapid, low-temperature, and continuous fabrication processes that can produce high-efficiency PSCs with a reduced fabrication cost and shortened energy payback time are important challenges on the way to commercialization. Herein, we report a reactive ion etching (RIE) method, which is an ultrafast room-temperature technique, to fabricate mesoporous TiO (mp-TiO) as an electron transport layer for high-efficiency PSCs. Replacing the conventional high-temperature annealing process by RIE reduces the total processing time for fabricating 20 PSCs by 40%. Additionally, the RIE-processed mp-TiO exhibits enhanced electron extraction, whereupon the optimized RIE-mp-TiO-based PSC exhibits a power conversion efficiency (PCE) of 19.60% without - hysteresis, when the devices were optimized with a TiCl surface treatment process. Finally, a flexible PSC employing RIE-mp-TiO is demonstrated with 17.29% PCE. Considering that the RIE process has been actively used in the semiconductor industry, including for the fabrication of silicon photovoltaic modules, the process developed in this work could be easily applied toward faster, simpler, and cheaper manufacturing of PSC modules.
近年来异军突起的钙钛矿太阳能电池（PSCs）目前正朝着商业化目标迈进。能够以降低的制造成本和缩短的能量回收期生产高效PSCs的快速、低温且连续的制造工艺，是商业化道路上的重要挑战。在此，我们报道一种反应离子蚀刻（RIE）方法，这是一种超快速室温技术，用于制备作为高效PSCs电子传输层的介孔TiO（mp-TiO）。用RIE取代传统的高温退火工艺可将制造20个PSCs的总处理时间缩短40%。此外，经RIE处理的mp-TiO表现出增强的电子提取能力，因此，当器件通过TiCl表面处理工艺进行优化时，基于优化的RIE-mp-TiO的PSC在无滞后现象的情况下表现出19.60%的功率转换效率（PCE）。最后，展示了一种采用RIE-mp-TiO的柔性PSC，其PCE为17.29%。鉴于RIE工艺已在半导体行业中得到广泛应用，包括用于制造硅光伏模块，这项工作中开发的工艺可以很容易地应用于更快、更简单和更便宜的PSC模块制造。
