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基于双4H-SiC结型肖特基势垒二极管(JBS)和肖特基势垒二极管(SBD)器件的高性能温度传感器

High-Performance Temperature Sensors Based on Dual 4H-SiC JBS and SBD Devices.

作者信息

Min Seong-Ji, Shin Myeong Cheol, Thi Nguyen Ngoc, Oh Jong-Min, Koo Sang-Mo

机构信息

Department of Electronic Materials Engineering, Kwangwoon University, 447-1 Wolgye-Dong, Nowon-Gu, Seoul 139-701, Korea.

Department of Electrical and Mechanical Engineering, Nagoya Institute of Technology, Gokisocho, Showa Ward, Nagoya, Aichi 466-8555, Japan.

出版信息

Materials (Basel). 2020 Jan 17;13(2):445. doi: 10.3390/ma13020445.

DOI:10.3390/ma13020445
PMID:31963426
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7014413/
Abstract

Schottky diode-based temperature sensors are the most common commercially available temperature sensors, and they are attracting increasing interest owing to their higher Schottky barrier height compared to their silicon counterparts. Therefore, this paper presents a comparison of the thermal sensitivity variation trend in temperature sensors, based on dual 4H-SiC junction barrier Schottky (JBS) diodes and Schottky barrier diodes (SBDs). The forward bias current-voltage characteristics were acquired by sweeping the DC bias voltage from 0 to 3 V. The dual JBS sensor exhibited a higher peak sensitivity (4.32 mV/K) than the sensitivity exhibited by the SBD sensor (2.85 mV/K), at temperatures ranging from 298 to 573 K. The JBS sensor exhibited a higher ideality factor and barrier height owing to the p-n junction in JBS devices. The developed sensor showed good repeatability, maintaining a stable output over several cycles of measurements on different days. It is worth noting that the ideality factor and barrier height influenced the forward biased voltage, leading to a higher sensitivity for the JBS device compared to the SBD device. This allows the JBS device to be suitably integrated with SiC power management and control circuitry to create a sensing module capable of working at high temperatures.

摘要

基于肖特基二极管的温度传感器是市面上最常见的温度传感器,由于其肖特基势垒高度高于硅基同类产品,因此越来越受到关注。因此,本文对基于双4H-SiC结势垒肖特基(JBS)二极管和肖特基势垒二极管(SBD)的温度传感器的热灵敏度变化趋势进行了比较。通过将直流偏置电压从0扫到3 V来获取正向偏置电流-电压特性。在298至573 K的温度范围内,双JBS传感器的峰值灵敏度(4.32 mV/K)高于SBD传感器的灵敏度(2.85 mV/K)。由于JBS器件中的p-n结,JBS传感器具有更高的理想因子和势垒高度。所开发的传感器具有良好的重复性,在不同日期的多个测量周期内保持稳定的输出。值得注意的是,理想因子和势垒高度影响正向偏置电压,导致JBS器件比SBD器件具有更高的灵敏度。这使得JBS器件能够与SiC电源管理和控制电路适当地集成,以创建一个能够在高温下工作的传感模块。

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本文引用的文献

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Sensors (Basel). 2019 May 24;19(10):2384. doi: 10.3390/s19102384.
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Top-down fabrication of 4H-SiC nano-channel field effect transistors.4H-SiC纳米通道场效应晶体管的自上而下制造。
J Nanosci Nanotechnol. 2014 Oct;14(10):7821-3. doi: 10.1166/jnn.2014.9387.
Materials (Basel). 2020 Sep 29;13(19):4335. doi: 10.3390/ma13194335.
4
Effect of Various Defects on 4H-SiC Schottky Diode Performance and Its Relation to Epitaxial Growth Conditions.各种缺陷对4H-SiC肖特基二极管性能的影响及其与外延生长条件的关系。
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