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关于通过射频磁控溅射在商业纯钛(CpTi)衬底上生长的TiC薄膜的微观结构、结构和摩擦学特性的数据集。

Dataset on microstructural, structural and tribology characterization of TiC thin film on CpTi substrate grown by RF magnetron sputtering.

作者信息

Abegunde Olayinka Oluwatosin, Akinlabi Esther Titilayo, Oladijo Philip Oluseyi

机构信息

Department of Mechanical Engineering Science, University of Johannesburg, Johannesburg, South Africa.

Department of Chemical, Materials and Metallurgy Engineering, Botswana Institute of Science and Technology, Palapye, Botswana.

出版信息

Data Brief. 2020 Jan 25;29:105205. doi: 10.1016/j.dib.2020.105205. eCollection 2020 Apr.

DOI:10.1016/j.dib.2020.105205
PMID:32055672
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7005493/
Abstract

The datasets in this article are supplementary to the corresponding research article [1, 2]. The planar morphology and topography of TiC thin films coated on commercially pure Titanium (CpTi) grown by RF magnetron sputtering were investigated using Field emission scanning electron microscope (FESEM) and Atomic force microscope (AFM). The mechanical properties such as Hardness and Young Modulus of the thin film coating was studied using Nanohardness. Furthermore, grazing incidence X-ray diffractometer (GIXRD) and Raman spectroscopy were used to analyse the structural and composition of the TiC thin film coating.

摘要

本文中的数据集是对相应研究论文[1, 2]的补充。使用场发射扫描电子显微镜(FESEM)和原子力显微镜(AFM)研究了通过射频磁控溅射在商业纯钛(CpTi)上生长的TiC薄膜的平面形态和形貌。使用纳米硬度研究了薄膜涂层的硬度和杨氏模量等力学性能。此外,使用掠入射X射线衍射仪(GIXRD)和拉曼光谱分析了TiC薄膜涂层的结构和成分。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/f43ad5cd1c97/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/836cc67fd17a/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/01405fca8447/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/9b7435afd832/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/a30ac5ef5ae0/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/f43ad5cd1c97/gr5.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/836cc67fd17a/gr1.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/01405fca8447/gr2.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/9b7435afd832/gr3.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/a30ac5ef5ae0/gr4.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/a37e/7005493/f43ad5cd1c97/gr5.jpg

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