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用于超弱磁场测量的具有交流调制和阻抗补偿的隧道磁阻传感器

Tunnel Magnetoresistance Sensor with AC Modulation and Impedance Compensation for Ultra-Weak Magnetic Field Measurement.

作者信息

Zhao Wenlei, Tao Xinchen, Ye Chaofeng, Tao Yu

机构信息

School of Information Science and Technology, ShanghaiTech University, Shanghai 201210, China.

China Shanghai Engineering Research Center of Energy Efficient and Custom AI IC, Shanghai 201210, China.

出版信息

Sensors (Basel). 2022 Jan 28;22(3):1021. doi: 10.3390/s22031021.

Abstract

Tunnel magnetoresistance (TMR) is a kind of magnetic sensor with the advantages of low cost and high sensitivity. For ultra-weak and low-frequency magnetic field measurement, the TMR sensor is affected by the 1/f noise. This paper proposes an AC modulation method with impedance compensation to improve the performance. The DC and AC characteristics of the sensors were measured and are presented here. It was found that both the equivalent resistance and capacitor of the sensors are affected by the external magnetic field. The TMR sensors are connected as a push-pull bridge circuit to measure the magnetic field. To reduce the common-mode noise, two similar bridge circuits form a magnetic gradiometer. Experimental results show that the sensor's sensitivity in the low-frequency range is obviously improved by the modulation and impedance compensation. The signal-to-noise ratio of the sensor at 1 Hz was increased about 25.3 dB by the AC modulation, impedance compensation, and gradiometer measurement setup. In addition, the sensitivity of the sensor was improved from 165.2 to 222.1 mV/V/mT. Ultra-weak magnetic signals, namely magnetocardiography signals of two human bodies, were measured by the sensor in an unshielded environment. It was seen that the R peak of MCG can be clearly visualized from the recorded signal.

摘要

隧道磁电阻(TMR)是一种具有低成本和高灵敏度优点的磁传感器。对于超弱和低频磁场测量,TMR传感器会受到1/f噪声的影响。本文提出一种具有阻抗补偿的交流调制方法来提高性能。对传感器的直流和交流特性进行了测量并在此展示。发现传感器的等效电阻和电容都受到外部磁场的影响。TMR传感器连接成推挽桥路来测量磁场。为了降低共模噪声,两个相似的桥路组成一个磁梯度计。实验结果表明,通过调制和阻抗补偿,传感器在低频范围内的灵敏度明显提高。通过交流调制、阻抗补偿和梯度计测量设置,传感器在1Hz时的信噪比提高了约25.3dB。此外,传感器的灵敏度从165.2mV/V/mT提高到了222.1mV/V/mT。在无屏蔽环境中,该传感器测量了两个人体的超弱磁信号,即心磁图信号。可以看到,从记录的信号中能够清晰地观察到心磁图的R波峰。

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