Vijjapu Mani Teja, Surya Sandeep G, Yuvaraja Saravanan, Zhang Xixiang, Alshareef Husam N, Salama Khaled N
Sensors Lab, Advanced Membranes and Porous Materials Center, Computer, Electrical and Mathematical Science and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia.
Physical Sciences and Engineering Division, King Abdullah University of Science and Technology (KAUST), Thuwal 23955-6900, Kingdom of Saudi Arabia.
ACS Sens. 2020 Apr 24;5(4):984-993. doi: 10.1021/acssensors.9b02318. Epub 2020 Feb 24.
We report an amorphous indium gallium zinc oxide (IGZO)-based toxic gas detection system. The microsystem contains an IGZO thin-film transistor (TFT) as a sensing element and exhibits remarkable selectivity and sensitivity to low concentrations of nitrogen dioxide (NO). In contrast to existing metal oxide-based gas sensors, which are active either at high temperature or with light activation, the developed IGZO TFT sensor is operable at room temperature and requires only visible light activation to revive the sensor after exposure to NO. Furthermore, we demonstrate air-stable sensors with an experimental limit of detection of 100 ppb. This is the first report on metal oxide TFT gas sensors without heating or continuous light activation. Unlike most existing gas sensing systems that take care of identifying the analytes alone, the developed IGZO microsystem not only quantifies NO gas concentration but also yields a 5-bit digital output. The compact microsystem, incorporating readout and analog-to-digital conversion modules developed using only two TFTs, paves the way for inexpensive toxic gas monitoring systems.
我们报道了一种基于非晶铟镓锌氧化物（IGZO）的有毒气体检测系统。该微系统包含一个IGZO薄膜晶体管（TFT）作为传感元件，对低浓度的二氧化氮（NO）表现出显著的选择性和灵敏度。与现有的基于金属氧化物的气体传感器不同，后者要么在高温下工作，要么通过光激活，而开发的IGZO TFT传感器可在室温下工作，并且在暴露于NO后仅需可见光激活即可恢复传感器性能。此外，我们展示了检测限为100 ppb的空气稳定型传感器。这是关于无需加热或连续光激活的金属氧化物TFT气体传感器的首次报道。与大多数现有的仅用于识别分析物的气体传感系统不同，开发的IGZO微系统不仅能对NO气体浓度进行量化，还能产生5位数字输出。该紧凑的微系统集成了仅使用两个TFT开发的读出和模数转换模块，为廉价的有毒气体监测系统铺平了道路。
