一种利用飞秒激光微加工结合玻璃键合技术在玻璃中制造的高通量微流体混合器。

A Microfluidic Mixer of High Throughput Fabricated in Glass Using Femtosecond Laser Micromachining Combined with Glass Bonding.

作者信息

Qi Jia, Li Wenbo, Chu Wei, Yu Jianping, Wu Miao, Liang Youting, Yin Difeng, Wang Peng, Wang Zhenhua, Wang Min, Cheng Ya

机构信息

State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China.

University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Micromachines (Basel). 2020 Feb 19;11(2):213. doi: 10.3390/mi11020213.

DOI:10.3390/mi11020213

PMID:32093086

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7074671/

Abstract

We demonstrate a microfluidic mixer of high mixing efficiency in fused silica substrate using femtosecond laser-induced wet etching and hydroxide-catalysis bonding method. The micromixer has a three-dimensional geometry, enabling efficient mixing based on Baker's transformation principle. The cross-sectional area of the fabricated micromixer was 0.5 × 0.5 mm, enabling significantly promotion of the throughput of the micromixer. The performance of the fabricated micromixers was evaluated by mixing up blue and yellow ink solutions with a flow rate as high as 6 mL/min.

摘要

我们展示了一种利用飞秒激光诱导湿法蚀刻和氢氧化催化键合方法在熔融石英基板上制备的具有高混合效率的微流体混合器。该微混合器具有三维几何结构，能够基于贝克变换原理实现高效混合。所制备微混合器的横截面积为0.5×0.5毫米，可显著提高微混合器的通量。通过以高达6毫升/分钟的流速混合蓝色和黄色墨水溶液来评估所制备微混合器的性能。