Liu Hang, Qi Guopeng, Tang Caisheng, Chen Maolin, Chen Yang, Shu Zhiwen, Xiang Haiyan, Jin Yuanyuan, Wang Shanshan, Li Huimin, Ouzounian Miray, Hu Travis Shihao, Duan Huigao, Li Shisheng, Han Zheng, Liu Song
Institute of Chemical Biology and Nanomedicine (ICBN), State Key Laboratory of Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, Changsha 410082, P. R. China.
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Science, Shenyang 110016, P. R. China.
ACS Appl Mater Interfaces. 2020 Mar 18;12(11):13174-13181. doi: 10.1021/acsami.9b22397. Epub 2020 Mar 6.
Growth of large-area, uniform, and high-quality monolayer transition-metal dichalcogenides (TMDs) for practical and industrial applications remains a long-standing challenge. The present study demonstrates a modified predeposited chemical vapor deposition (CVD) process by employing an annealing procedure before sulfurization, which helps in achieving large-area, highly uniform, and high-quality TMDs on various substrates. The annealing procedure resulted in a molten liquid state of the precursors in the CVD process, which not only facilitated a uniform redistribution of the precursor on the substrate (avoid the aggregation) because of the uniform redistribution of the liquid precursor on the substrate but more importantly avoided the undesired multilayer growth via the self-limited lateral supply precursors mechanism. A 2 in. uniform and continuous monolayer WS film has been synthesized on the SiO/Si substrate. Moreover, uniform monolayer WS single crystals can be prepared on more general and various substrates including sapphire, mica, quartz, and SiN using the same growth procedure. Besides, this growth mechanism can be generalized to synthesize other monolayer TMDs such as MoS and MoS/WS heterostructures. Hence, the present method provides a generalized attractive strategy to grow large-area, uniform, single-layer two-dimensional (2D) materials. This study has significant implications in the advancement of batch production of various 2D-material-based devices for industrial and commercial applications.
生长大面积、均匀且高质量的单层过渡金属二硫属化物(TMDs)以用于实际和工业应用仍然是一个长期存在的挑战。本研究展示了一种改进的预沉积化学气相沉积(CVD)工艺,即在硫化之前采用退火程序,这有助于在各种衬底上获得大面积、高度均匀且高质量的TMDs。退火程序在CVD过程中使前驱体处于熔融液态,这不仅由于液态前驱体在衬底上的均匀再分布而促进了前驱体在衬底上的均匀再分布(避免聚集),更重要的是通过自限性横向供应前驱体机制避免了不期望的多层生长。已在SiO/Si衬底上合成了2英寸均匀且连续的单层WS薄膜。此外,使用相同的生长程序可以在包括蓝宝石、云母、石英和SiN在内的更通用且多样的衬底上制备均匀的单层WS单晶。此外,这种生长机制可以推广到合成其他单层TMDs,如MoS和MoS/WS异质结构。因此,本方法为生长大面积、均匀的单层二维(2D)材料提供了一种具有普遍吸引力的策略。本研究对推进用于工业和商业应用的各种基于2D材料的器件的批量生产具有重要意义。