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二维过渡金属二硫属化物的旋涂前驱体介导化学气相沉积的最新进展

Recent Advances in Spin-coating Precursor Mediated Chemical Vapor Deposition of Two-Dimensional Transition Metal Dichalcogenides.

作者信息

Shen Dingyi, Jin Yejun, Zhang Zucheng, Song Rong, Liu Miaomiao, Li Wei, Li Xin, Wu Ruixia, Li Bo, Li Jia, Zhao Bei, Duan Xidong

机构信息

Hunan Key Laboratory of Two-Dimensional Materials, State Key Laboratory for Chemo/Biosensing and Chemometrics, College of Chemistry and Chemical Engineering, Hunan University, 410082 Changsha, China.

School of Physics and Electronics, Hunan University, 410082 Changsha, China.

出版信息

Precis Chem. 2024 Feb 13;2(7):282-299. doi: 10.1021/prechem.3c00115. eCollection 2024 Jul 22.

Abstract

Two-dimensional (2D) transition metal dichalcogenides (TMDs) have garnered widespread interest in the scientific community and industry for their exceptional physical and chemistry properties, and great potential for applications in diverse fields including (opto)electronics, electrocatalysis, and energy storage. Chemical vapor deposition (CVD) is one of the most compelling growth methods for the scalable growth of high-quality 2D TMDs. However, the conventional CVD process for synthesis of 2D TMDs still encounters significant challenges, primarily attributed to the high melting point of precursor powders, and achieving a uniform distribution of precursor atmosphere on the substrate to obtain controllable smaple domains is difficult. The spin-coating precursor mediated chemical vapor deposition (SCVD) strategy provides refinement over traditional methods by eliminating the use of solid precursors and ensuring a more clean and uniform distribution of the growth material on the substrate. Additionally, the SCVD process allows fine-tuning of material thickness and purity by manipulating solution composition, concentration, and the spin coating process. This Review presents a comprehensive summary of recent advances in controllable growth of 2D TMDs with a SCVD strategy. First, a series of various liquid precursors, additives, source supply methods, and substrate engineering strategies for preparing atomically thin TMDs by SCVD are introduced. Then, 2D TMDs heterostructures and novel doped TMDs fabricated through the SCVD method are discussed. Finally, the current challenges and perspectives to synthesize 2D TMDs using SCVD are discussed.

摘要

二维(2D)过渡金属二硫属化物(TMDs)因其优异的物理和化学性质,以及在包括(光)电子学、电催化和能量存储等不同领域的巨大应用潜力,在科学界和工业界引起了广泛关注。化学气相沉积(CVD)是用于高质量2D TMDs可扩展生长的最具吸引力的生长方法之一。然而,用于合成2D TMDs的传统CVD工艺仍然面临重大挑战,主要归因于前驱体粉末的高熔点,并且难以在衬底上实现前驱体气氛的均匀分布以获得可控的样品区域。旋涂前驱体介导的化学气相沉积(SCVD)策略通过消除固体前驱体的使用并确保生长材料在衬底上更清洁、均匀的分布,对传统方法进行了改进。此外,SCVD工艺允许通过控制溶液组成、浓度和旋涂工艺来微调材料的厚度和纯度。本综述全面总结了采用SCVD策略在2D TMDs可控生长方面的最新进展。首先,介绍了一系列用于通过SCVD制备原子级薄TMDs的各种液体前驱体、添加剂、源供应方法和衬底工程策略。然后,讨论了通过SCVD方法制备的2D TMDs异质结构和新型掺杂TMDs。最后,讨论了使用SCVD合成2D TMDs目前面临的挑战和前景。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/08f1/11504193/45f2e3d3a78c/pc3c00115_0001.jpg

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