Lee H H, Kim K H, Kim H Y
School of Mechatronics Engineering, Korea Polytechnic University, Siheung-si 15073, South Korea.
Manufacturing System R&D Group, Korea Institute of Industrial Technology, Cheonan-si 31056, South Korea.
Rev Sci Instrum. 2020 Feb 1;91(2):026101. doi: 10.1063/1.5122806.
In recent years, precision stages, which are widely used in many industrial fields, have been required to have a higher speed, larger size, and higher precision to help realize higher productivity and product quality. High-performance positioning techniques for inspection and production equipment are classified as one of the most challenging technologies. Vibration control is crucial to realize high-precision positioning technologies. In a precision system, various vibrations exist, which act as disturbances and can degrade the system performance. Minimizing the vibrations generated by the system can, thus, help improve the accuracy of system positioning. This paper proposes a hybrid active mount module for a precision stage. The developed module improves stage performance by reducing the base vibration arising from the floor, minimizing the vibration caused by the driving linear motors of the precision stage, and reducing the settling time by compensating the offset displacement due to the nonlinearity of the passive mount during stage driving. The prototype design is presented herein, and the experimental results demonstrate the potential of the developed device. The developed system is expected to effectively improve the stage performance by controlling the various causes of vibration.
近年来，广泛应用于许多工业领域的精密工作台需要具备更高的速度、更大的尺寸和更高的精度，以实现更高的生产率和产品质量。用于检测和生产设备的高性能定位技术被归类为最具挑战性的技术之一。振动控制对于实现高精度定位技术至关重要。在精密系统中，存在各种振动，这些振动会成为干扰并降低系统性能。因此，最小化系统产生的振动有助于提高系统定位的精度。本文提出了一种用于精密工作台的混合有源安装模块。所开发的模块通过减少地面产生的基座振动、最小化精密工作台驱动线性电机引起的振动以及在工作台驱动期间补偿由于被动安装的非线性而产生的偏移位移来减少稳定时间，从而提高工作台性能。本文介绍了原型设计，实验结果证明了所开发设备的潜力。预计所开发的系统通过控制各种振动原因能够有效提高工作台性能。
