Shan Guanqiao, Li Yingzi, Zhang Liwen, Wang Zhenyu, Zhang Yingxu, Qian Jianqiang
Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China.
Rev Sci Instrum. 2015 Oct;86(10):101501. doi: 10.1063/1.4932580.
Recent interest in high-precision positioning stages with large travel ranges has sparked renewed attention to the development of voice coil motors (VCMs). Due to their large output force, VCMs can actuate more complicated flexure structures, eliminate rail friction, and improve positioning speed. The VCM structure is both compact and flexible; hence, it is convenient to design VCMs for a variety of stage structures. Furthermore, VCMs combined with other actuators are able to achieve large travel ranges with high precision. In this paper, we summarize the principles and control methods of a typical VCM, and we analyze its properties, including thrust force, acceleration, and response time. We then present recent research on high-precision VCM positioning stages with large travel ranges.
近期对具有大行程范围的高精度定位平台的关注，引发了对音圈电机（VCM）发展的重新关注。由于其输出力大，音圈电机可以驱动更复杂的挠性结构，消除导轨摩擦，并提高定位速度。音圈电机结构紧凑且灵活；因此，为各种平台结构设计音圈电机很方便。此外，音圈电机与其他执行器相结合能够实现大行程范围的高精度定位。在本文中，我们总结了典型音圈电机的原理和控制方法，并分析了其特性，包括推力、加速度和响应时间。然后，我们介绍了近期关于具有大行程范围的高精度音圈电机定位平台的研究。
