Hashimoto Yoichiro, Ito Hiroyuki, Sasajima Masahiro
Analysis Systems Solution Development Department, Hitachi High-Technologies Corporation, 3-2-1 Sakado Takatsu, Kanagawa Science Park R&D Business Park Building C-1F, Kawasaki, Kanagawa 213-0012, Japan.
Analysis Systems Design 1st Department, Hitachi High-Technologies Corporation, 882, Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
Microscopy (Oxf). 2020 May 21;69(3):167-172. doi: 10.1093/jmicro/dfaa006.
Image contrast between carbon nanotubes (CNTs) and polytetrafluoroethylene (PTFE) in a CNT/PTFE composite film, which is difficult to obtain by conventional backscattered electron (BSE) imaging, was optimized to better elucidate the distribution of CNT in the film. Ultra-low landing energy condition (0.3 keV in this study) was used to prevent specimen damage due to electron beam irradiation. Signal acceptance maps, which represent the distributions of energy and take-off angle, were calculated to evaluate the features of the signal detection system used in this study. SEM images of this composite film were taken under several sets of conditions and analyzed using these acceptance maps. CNT and PTFE in the composite film can be clearly distinguished with material and topographic contrasts using the BSE signal under optimized energy and take-off angle ranges, even at ultra-low landing energy conditions.
碳纳米管（CNT）/聚四氟乙烯（PTFE）复合薄膜中碳纳米管与聚四氟乙烯之间的图像对比度难以通过传统的背散射电子（BSE）成像获得，对其进行了优化，以更好地阐明碳纳米管在薄膜中的分布。采用超低着陆能量条件（本研究中为0.3 keV）来防止电子束辐照对样品造成损伤。计算了表示能量和出射角分布的信号接受图，以评估本研究中使用的信号检测系统的特性。在几组条件下拍摄了该复合薄膜的扫描电子显微镜（SEM）图像，并使用这些接受图进行分析。即使在超低着陆能量条件下，在优化的能量和出射角范围内，利用背散射电子信号，复合薄膜中的碳纳米管和聚四氟乙烯也能通过材料和形貌对比度清晰区分。
