School of Mechanical Engineering, Department of Instrument Science and Technology, Nanjing University of Science and Technology, Nanjing 210094, Jiangsu, China.
Sensors (Basel). 2020 Mar 6;20(5):1455. doi: 10.3390/s20051455.
This paper presents a MEMS (Micro-Electro-Mechanical System) Silicon Oscillating Accelerometer (SOA) with AC (alternating current) polarization to expand its bias-instability limited by the up-converted 1/f noise from front-end transimpedance amplifier (TIA). In contrast to the conventional DC (direct current) scheme, AC polarization breaks the trade-off between input transistor gate size and white noise floor of TIA, a relative low input loading capacitance can be implemented for low noise consideration. Besides, a self-compensation technique combining polarization source and reference in automatic-gain-control (AGC) is put forward. It cancels the 1/f noise and drift introduced by the polarization source itself, which applies to both DC and AC polarization cases. The experimental result indicates the proposed AC polarization and self-compensation strategy expand the bias-instability of studied SOA from 2.58 μg to 0.51 μg with a full scale of ± 30 g, a 155.6 dB dynamic range is realized in this work.
本文提出了一种采用交流极化的微机电系统（MEMS）硅微振动加速度计（SOA），以扩展其由前端跨阻放大器（TIA）上变频的 1/f 噪声引起的偏置不稳定性限制。与传统的直流（DC）方案相比，交流极化打破了输入晶体管栅极尺寸和 TIA 的白噪声基底之间的权衡，为了低噪声考虑，可以实现相对低的输入负载电容。此外，提出了一种结合自动增益控制（AGC）中的极化源和参考的自补偿技术。它可以消除由极化源本身引入的 1/f 噪声和漂移，适用于直流和交流极化情况。实验结果表明，所提出的交流极化和自补偿策略将研究的 SOA 的偏置不稳定性从 2.58μg扩展到 0.51μg，满量程为±30g，在这项工作中实现了 155.6dB 的动态范围。
