Zhang Jing, Yang Zhuo, Wu Tianhao, Yao Zhichao, Lin Chen, Su Yan
School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China.
Navigation and Control Technology Research Institute, Norinco Group, Beijing 100089, China.
Micromachines (Basel). 2025 Jan 30;16(2):169. doi: 10.3390/mi16020169.
In differential MEMS resonant sensors, a pair of resonators are interconnected with other structural components while sharing a common substrate. This leads to mutual coupling of vibration energy between resonators, interfering with their frequency outputs and affecting the sensor's static performance. This paper aims to model and analyze the vibration coupling phenomena in differential common-based MEMS resonators (DCMR). A mechanical model of the DCMR structure was established and refined through finite element simulation analysis. Theoretical calculations yielded vibration coupling curves for two typical silicon resonant accelerometer (SRA) structures containing DCMR: SRA-V1 and SRA-V2, with coupling stiffness values of 2.361 × 10 N/m and 1.370 × 10 N/m, respectively. An experimental test system was constructed to characterize the vibration coupling behavior. The results provided coupling amplitude-frequency characteristic curves and coupling stiffness values (7.073 × 10 N/m and 1.068 × 10 N/m for SRA-V1 and SRA-V2, respectively) that validated the theoretical analysis and computational model. This novel approach enables effective evaluation of coupling intensity between 5resonators and provides a theoretical foundation for optimizing device structural designs.
在差分微机电系统（MEMS）谐振传感器中，一对谐振器在共享一个公共衬底的同时与其他结构部件相互连接。这会导致谐振器之间振动能量的相互耦合，干扰其频率输出并影响传感器的静态性能。本文旨在对基于差分公共结构的MEMS谐振器（DCMR）中的振动耦合现象进行建模和分析。通过有限元模拟分析建立并完善了DCMR结构的力学模型。理论计算得出了包含DCMR的两种典型硅谐振加速度计（SRA）结构即SRA-V1和SRA-V2的振动耦合曲线，其耦合刚度值分别为2.361×10 N/m和1.370×10 N/m。构建了一个实验测试系统来表征振动耦合行为。结果给出了耦合幅频特性曲线和耦合刚度值（SRA-V1和SRA-V2分别为7.073×10 N/m和1.068×10 N/m），验证了理论分析和计算模型。这种新方法能够有效评估谐振器之间的耦合强度，并为优化器件结构设计提供理论基础。
