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通过三维到二维模式转变在晶格失配衬底上生长单晶薄膜。

Growth of single crystalline films on lattice-mismatched substrates through 3D to 2D mode transition.

作者信息

Itagaki Naho, Nakamura Yuta, Narishige Ryota, Takeda Keigo, Kamataki Kunihiro, Koga Kazunori, Hori Masaru, Shiratani Masaharu

机构信息

Graduate School of Information Science and Electrical Engineering, Kyushu University, Fukuoka, 819-0395, Japan.

Department of Electrical and Electronic Engineering, Meijo University, Nagoya, 468-8502, Japan.

出版信息

Sci Rep. 2020 Mar 13;10(1):4669. doi: 10.1038/s41598-020-61596-w.

DOI:10.1038/s41598-020-61596-w
PMID:32170213
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7070095/
Abstract

Regarding crystalline film growth on large lattice-mismatched substrates, there are two primary modes by which thin films grow on a crystal surface or interface. They are Volmer-Weber (VW: island formation) mode and Stranski-Krastanov (SK: layer-plus-island) mode. Since both growth modes end up in the formation of three-dimensional (3D) islands, fabrication of single crystalline films on lattice-mismatched substrates has been challenging. Here, we demonstrate another growth mode, where a buffer layer consisting of 3D islands initially forms and a relaxed two-dimensional (2D) layer subsequently grows on the buffer layer. This 3D-2D mode transition has been realized using impurities. We observed the 3D-2D mode transition for the case of ZnO film growth on 18%-lattice-mismatched sapphire substrates. First, nano-sized 3D islands grow with the help of nitrogen impurities. Then, the islands coalesce to form a 2D layer after cessation of the nitrogen supply, whereupon an increase in the surface energy may provide a driving force for the coalescence. Finally, the films grow in 2D mode, forming atomically flat terraces. We believe that our findings will offer new opportunities for high-quality film growth of a wide variety of materials that have no lattice-matched substrates.

摘要

关于在大晶格失配衬底上的晶体薄膜生长，薄膜在晶体表面或界面上生长有两种主要模式。它们是沃尔默 - 韦伯（VW：岛状形成）模式和斯特兰斯基 - 克拉斯坦诺夫（SK：层加岛）模式。由于这两种生长模式最终都会形成三维（3D）岛，因此在晶格失配衬底上制备单晶薄膜一直具有挑战性。在此，我们展示了另一种生长模式，即最初由3D岛组成的缓冲层形成，随后在缓冲层上生长出弛豫的二维（2D）层。这种3D - 2D模式转变是通过杂质实现的。我们观察到在与晶格失配18%的蓝宝石衬底上生长ZnO薄膜时的3D - 2D模式转变。首先，纳米尺寸的3D岛在氮杂质的帮助下生长。然后，在停止供应氮之后，这些岛合并形成2D层，此时表面能的增加可能为合并提供驱动力。最后，薄膜以2D模式生长，形成原子级平整的台面。我们相信我们的发现将为在没有晶格匹配衬底的各种材料的高质量薄膜生长提供新的机会。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/31b3f9662bab/41598_2020_61596_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/af7b4b7a7557/41598_2020_61596_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/437d0e44b830/41598_2020_61596_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/dfe7b8c8ddca/41598_2020_61596_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/5c53a30fba12/41598_2020_61596_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/5cbf398e18c5/41598_2020_61596_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/98bfc47e4eb3/41598_2020_61596_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/b86f7f6d9f3c/41598_2020_61596_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/89804d7ca361/41598_2020_61596_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/31b3f9662bab/41598_2020_61596_Fig9_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/af7b4b7a7557/41598_2020_61596_Fig1_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/437d0e44b830/41598_2020_61596_Fig2_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/dfe7b8c8ddca/41598_2020_61596_Fig3_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/5c53a30fba12/41598_2020_61596_Fig4_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/5cbf398e18c5/41598_2020_61596_Fig5_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/98bfc47e4eb3/41598_2020_61596_Fig6_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/b86f7f6d9f3c/41598_2020_61596_Fig7_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/89804d7ca361/41598_2020_61596_Fig8_HTML.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/6cad/7070095/31b3f9662bab/41598_2020_61596_Fig9_HTML.jpg

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