Zhao Hongbo, Li Mengwei, Zhang Rui, Wang Zhibin, Xie Kunyang, Xin Chenguang, Jin Li, Liang Zhouxin
Appl Opt. 2020 Jan 1;59(1):16-21. doi: 10.1364/AO.59.000016.
A high-precision microdisplacement sensor based on zeroth-order diffraction of a single-layer optical grating is reported. Laser grating interference occurs when part of the laser is reflected diffraction by the grating and another part is vertically reflected back by a mirror and diffracted again by the grating, thus generating optical interferometric detection. For the purpose of obtaining the optimal contrast of the optical interferometric detection, the duty cycle of the grating and the orders of diffraction were optimized by the diffraction scalar theory. The microdisplacement sensor demonstrates a sensitivity of 0.40%/nm, a resolution of 0.6 nm, and a full-scale range of up to 100 µm. This work enables a high-performance displacement sensor, and provides a theoretical and technical basis for the design of a displacement sensor with an ultracompact structure.
报道了一种基于单层光学光栅零阶衍射的高精度微位移传感器。当部分激光被光栅反射衍射，另一部分被镜子垂直反射回并再次被光栅衍射时，会发生激光光栅干涉，从而实现光学干涉检测。为了获得光学干涉检测的最佳对比度，利用衍射标量理论对光栅的占空比和衍射级次进行了优化。该微位移传感器的灵敏度为0.40%/nm，分辨率为0.6 nm，满量程范围高达100 µm。这项工作实现了一种高性能的位移传感器，并为超紧凑结构位移传感器的设计提供了理论和技术基础。
