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基于电热驱动的低压双轴MEMS扫描仪的实时李萨如图像成像。

Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation.

作者信息

Tanguy Quentin A A, Gaiffe Olivier, Passilly Nicolas, Cote Jean-Marc, Cabodevila Gonzalo, Bargiel Sylwester, Lutz Philippe, Xie Huikai, Gorecki Christophe

出版信息

Opt Express. 2020 Mar 16;28(6):8512-8527. doi: 10.1364/OE.380690.

DOI:10.1364/OE.380690
PMID:32225475
Abstract

Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical Coherence Tomography (OCT). These scanners are required to be fast to achieve real-time image reconstruction while working at low actuation voltage to comply with medical standards. In this context, we report a 2-axis Micro-Electro-Mechanical Systems (MEMS) electrothermal micro-scannercapable of imaging large fields of view at high frame rates, e.g. from 10 to 80 frames per second. For this purpose, Lissajous scan parameters are chosen to provide the optimal image quality within the scanner capabilities and the sampling rate limit, resulting from the limited A-scan rate of typical swept-sources used for OCT. Images of 233 px × 203 px and 53 px × 53 px at 10 fps and 61 fps, respectively, are experimentally obtained and demonstrate the potential of this micro-scannerfor high definition and high frame rate endoscopic Lissajous imaging.

摘要

基于微机电系统(MEMS)扫描仪的激光扫描在生物医学内镜成像领域,如共聚焦显微镜或光学相干断层扫描(OCT)中,已变得极具吸引力。这些扫描仪需要快速运行以实现实时图像重建,同时要在低驱动电压下工作,以符合医学标准。在此背景下,我们报道了一种两轴微机电系统(MEMS)电热微扫描仪,它能够以高帧率对大视野进行成像,例如每秒10至80帧。为此,选择李萨如扫描参数,以便在扫描仪能力和采样率限制范围内提供最佳图像质量,该采样率限制是由用于OCT的典型扫频光源有限的A扫描速率导致的。分别在10帧/秒和61帧/秒的情况下,通过实验获得了233像素×203像素和53像素×53像素的图像,证明了这种微扫描仪在高清和高帧率内镜李萨如成像方面的潜力。

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