Seo Yeong-Hyeon, Hwang Kyungmin, Jeong Ki-Hun
Opt Express. 2018 Feb 19;26(4):4780-4785. doi: 10.1364/OE.26.004780.
We report a 1.65 mm diameter forward-viewing confocal endomicroscopic catheter using a flip-chip bonded electrothermal MEMS fiber scanner. Lissajous scanning was implemented by the electrothermal MEMS fiber scanner. The Lissajous scanned MEMS fiber scanner was precisely fabricated to facilitate flip-chip connection, and bonded with a printed circuit board. The scanner was successfully combined with a fiber-based confocal imaging system. A two-dimensional reflectance image of the metal pattern 'OPTICS' was successfully obtained with the scanner. The flip-chip bonded scanner minimizes electrical packaging dimensions. The inner diameter of the flip-chip bonded MEMS fiber scanner is 1.3 mm. The flip-chip bonded MEMS fiber scanner is fully packaged with a 1.65 mm diameter housing tube, 1 mm diameter GRIN lens, and a single mode optical fiber. The packaged confocal endomicroscopic catheter can provide a new breakthrough for diverse in-vivo endomicroscopic applications.
我们报告了一种使用倒装芯片键合电热微机电系统（MEMS）光纤扫描仪的直径为1.65毫米的前视共聚焦内镜导管。电热MEMS光纤扫描仪实现了李萨如图形扫描。经过精确制造的李萨如图形扫描MEMS光纤扫描仪便于倒装芯片连接，并与印刷电路板键合。该扫描仪成功地与基于光纤的共聚焦成像系统相结合。利用该扫描仪成功获得了金属图案“OPTICS”的二维反射图像。倒装芯片键合扫描仪将电气封装尺寸减到最小。倒装芯片键合MEMS光纤扫描仪的内径为1.3毫米。倒装芯片键合MEMS光纤扫描仪完全封装在直径为1.65毫米的外壳管、直径为1毫米的梯度折射率（GRIN）透镜和单模光纤中。这种封装好的共聚焦内镜导管可为各种体内内镜应用提供新的突破。
