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使用二甲基二甲氧基硅烷前驱体通过化学气相沉积法合成二氧化硅膜。

Synthesis of Silica Membranes by Chemical Vapor Deposition Using a Dimethyldimethoxysilane Precursor.

作者信息

Oyama S Ted, Aono Haruki, Takagaki Atsushi, Sugawara Takashi, Kikuchi Ryuji

机构信息

College of Chemical Engineering, Fuzhou University, Fuzhou 350116, China.

Department of Chemical Systems Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan.

出版信息

Membranes (Basel). 2020 Mar 22;10(3):50. doi: 10.3390/membranes10030050.

DOI:10.3390/membranes10030050
PMID:32235698
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7143120/
Abstract

Silica-based membranes prepared by chemical vapor deposition of tetraethylorthosilicate (TEOS) on γ-alumina overlayers are known to be effective for hydrogen separation and are attractive for membrane reactor applications for hydrogen-producing reactions. In this study, the synthesis of the membranes was improved by simplifying the deposition of the intermediate γ-alumina layers and by using the precursor, dimethyldimethoxysilane (DMDMOS). In the placement of the γ-alumina layers, earlier work in our laboratory employed four to five dipping-calcining cycles of boehmite sol precursors to produce high H selectivities, but this took considerable time. In the present study, only two cycles were needed, even for a macro-porous support, through the use of finer boehmite precursor particle sizes. Using the simplified fabrication process, silica-alumina composite membranes with H permeance > 10 mol m s Pa and H/N selectivity >100 were successfully synthesized. In addition, the use of the silica precursor, DMDMOS, further improved the H permeance without compromising the H/N selectivity. Pure DMDMOS membranes proved to be unstable against hydrothermal conditions, but the addition of aluminum tri-sec-butoxide (ATSB) improved the stability just like for conventional TEOS membranes.

摘要

通过在γ-氧化铝覆盖层上化学气相沉积原硅酸四乙酯(TEOS)制备的二氧化硅基膜,已知对氢气分离有效,并且对于用于制氢反应的膜反应器应用具有吸引力。在本研究中,通过简化中间γ-氧化铝层的沉积并使用前驱体二甲基二甲氧基硅烷(DMDMOS),改进了膜的合成。在γ-氧化铝层的放置方面,我们实验室早期的工作采用勃姆石溶胶前驱体进行四到五个浸渍-煅烧循环以产生高的氢气选择性,但这需要相当长的时间。在本研究中,即使对于大孔载体,通过使用更细的勃姆石前驱体颗粒尺寸,仅需要两个循环。使用简化的制造工艺,成功合成了氢气渗透率>10 mol m⁻² s⁻¹ Pa⁻¹且氢气/氮气选择性>100的二氧化硅-氧化铝复合膜。此外,二氧化硅前驱体DMDMOS的使用进一步提高了氢气渗透率,同时不影响氢气/氮气选择性。纯DMDMOS膜被证明对水热条件不稳定,但添加三仲丁醇铝(ATSB)像传统TEOS膜一样提高了稳定性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/efa9/7143120/94fc980a8195/membranes-10-00050-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/efa9/7143120/9b034a59a71d/membranes-10-00050-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/efa9/7143120/94fc980a8195/membranes-10-00050-g014.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/efa9/7143120/9b034a59a71d/membranes-10-00050-g013.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/efa9/7143120/94fc980a8195/membranes-10-00050-g014.jpg

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