ASIC and System State Key Lab, Department of Microelectronics, Fudan University, Shanghai 200433, China.
Sensors (Basel). 2019 Feb 6;19(3):659. doi: 10.3390/s19030659.
Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to design and optimize the SIDE structure. The experimental data show very good agreement with the simulation. The sensitivity of the SIDE sensor is 0.0063% ± 0.0002% RH. Its response/recovery time is 20 s/22 s. The maximum capacitance drift under different relative humidity is 1.28% RH.
近年来，由于在芯片制造、医疗保健、农业等领域的广泛应用，湿度传感器受到了广泛的研究。我们提出了一种基于聚酰亚胺（PI）的带有屏蔽电极的叉指电极下电容式湿度传感器（SIDE）。得益于屏蔽电极，这种湿度传感器结合了平行板电容传感器的高灵敏度和叉指电极电容传感器的快速响应。我们使用 COMSOL Multiphysics 来设计和优化 SIDE 结构。实验数据与模拟结果非常吻合。SIDE 传感器的灵敏度为 0.0063%±0.0002%RH。其响应/恢复时间为 20 s/22 s。在不同相对湿度下，最大电容漂移为 1.28%RH。
