基于低温共烧陶瓷（LTCC）技术的 LC 无线微流控传感器。

An LC Wireless Microfluidic Sensor Based on Low Temperature Co-Fired Ceramic (LTCC) Technology.

机构信息

CAS Key Laboratory of Inorganic Functional Materials and Devices, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 200050, China.

Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.

出版信息

Sensors (Basel). 2019 Mar 8;19(5):1189. doi: 10.3390/s19051189.

This work reports a novel wireless microfluidic biosensor based on low temperature co-fired ceramic (LTCC) technology. The wireless biosensor consists of a planar spiral inductor and parallel plate capacitor (LC) resonant antenna, which integrates with microchannel bends in the LTCC substrate. The wireless response of the biosensor was associated to the changes of its resonant frequency due to the alteration in the permittivity of the liquid flow in the microchannel. The wireless sensing performance to different organic liquids with permittivity from 3 to 78.5 was presented. The measured results are in good agreement with the theoretical calculation. The wireless detection for the concentration of glucose in water solution was investigated, and an excellent linear response and repeatability were obtained. This kind of LC wireless microfluidic sensor is very promising in establishing wireless lab-on-a-chip for biomedical and chemical applications.

本工作报道了一种基于低温共烧陶瓷（LTCC）技术的新型无线微流控生物传感器。无线生物传感器由平面螺旋电感和并联板电容器（LC）谐振天线组成，集成在 LTCC 基板的微通道弯曲处。由于微通道中流动液体的介电常数发生变化，生物传感器的无线响应与谐振频率的变化相关联。展示了无线传感器对介电常数在 3 到 78.5 之间的不同有机液体的传感性能。测量结果与理论计算吻合较好。还研究了无线检测水溶液中葡萄糖浓度的方法，得到了良好的线性响应和重复性。这种 LC 无线微流控传感器在建立用于生物医学和化学应用的无线片上实验室方面具有广阔的应用前景。