Sotillo Belén, Ariza Rocio, Siegel Jan, Solis Javier, Fernández Paloma
Materials Physics Department, Faculty of Physics, Complutense University of Madrid, 28040 Madrid, Spain.
Laser Processing Group, Instituto de Óptica (IO-CSIC), Consejo Superior de Investigaciones Científicas, Serrano 121, 28006 Madrid, Spain.
Nanomaterials (Basel). 2020 Apr 11;10(4):731. doi: 10.3390/nano10040731.
In this work, we demonstrate the use of laser-induced periodic surface structures (LIPSS) as templates for the selective growth of ordered micro- and nanostructures of ZnO. Different types of LIPSS were first produced in Si-(100) substrates including ablative low-frequency spatial (LSF) LIPSS, amorphous-crystalline (a-c) LIPSS, and structures. These laser-structured substrates were subsequently used for depositing ZnO using the vapor-solid (VS) method in order to analyze the formation of organized ZnO structures. We used scanning electron microscopy and micro-Raman spectroscopy to assess the morphological and structural characteristics of the ZnO micro/nano-assemblies obtained and to identify the characteristics of the laser-structured substrates inducing the preferential deposition of ZnO. The formation of aligned assemblies of micro- and nanocrystals of ZnO was successfully achieved on LSF-LIPSS and a-c LIPSS. These results point toward a feasible route for generating well aligned assemblies of semiconductor micro- and nanostructures of good quality by the VS method on substrates, where the effect of lattice mismatch is reduced by laser-induced local disorder and likely by a small increase of surface roughness.
在这项工作中,我们展示了利用激光诱导周期性表面结构(LIPSS)作为模板来选择性生长有序的ZnO微米和纳米结构。首先在Si-(100)衬底上制备了不同类型的LIPSS,包括烧蚀性低频空间(LSF)LIPSS、非晶-晶体(a-c)LIPSS以及其他结构。随后,这些经过激光结构化的衬底被用于通过气-固(VS)法沉积ZnO,以便分析有序ZnO结构的形成。我们使用扫描电子显微镜和显微拉曼光谱来评估所获得的ZnO微/纳米组件的形态和结构特征,并确定诱导ZnO优先沉积的激光结构化衬底的特征。在LSF-LIPSS和a-c LIPSS上成功实现了ZnO微米和纳米晶体的排列组件的形成。这些结果表明了一条可行的途径,即通过VS法在衬底上生成高质量的、排列良好的半导体微米和纳米结构组件,其中激光诱导的局部无序以及可能的表面粗糙度小幅度增加降低了晶格失配的影响。