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碳化硅衬底上纳米级厚度的金/钯双金属薄膜的形态演变

Morphology Evolution of Nanoscale-Thick Au/Pd Bimetallic Films on Silicon Carbide Substrate.

作者信息

Ruffino Francesco, Censabella Maria, Piccitto Giovanni, Grimaldi Maria Grazia

机构信息

Dipartimento di Fisica e Astronomia "Ettore Majorana", Università di Catania, MATIS CNR-IMM, via S. Sofia 64, 95123 Catania, Italy.

出版信息

Micromachines (Basel). 2020 Apr 14;11(4):410. doi: 10.3390/mi11040410.

DOI:10.3390/mi11040410
PMID:32295291
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7231346/
Abstract

Bimetallic Au/Pd nanoscale-thick films were sputter-deposited at room temperature on a silicon carbide (SiC) surface, and the surface-morphology evolution of the films versus thickness was studied with scanning electron microscopy. This study allowed to elucidate the Au/Pd growth mechanism by identifying characteristic growth regimes, and to quantify the characteristic parameters of the growth process. In particular, we observed that the Au/Pd film initially grew as three-dimensional clusters; then, increasing Au/Pd film thickness, film morphology evolved from isolated clusters to partially coalesced wormlike structures, followed by percolation morphology, and, finally, into a continuous rough film. The application of the interrupted coalescence model allowed us to evaluate a critical mean cluster diameter for partial coalescence, and the application of Vincent's model allowed us to quantify the critical Au/Pd coverage for percolation transition.

摘要

在室温下,通过溅射沉积法在碳化硅(SiC)表面制备了双金属Au/Pd纳米厚膜,并利用扫描电子显微镜研究了薄膜表面形貌随厚度的演变。通过识别特征生长模式,该研究有助于阐明Au/Pd的生长机制,并量化生长过程的特征参数。具体而言,我们观察到Au/Pd薄膜最初以三维团簇的形式生长;然后,随着Au/Pd薄膜厚度的增加,薄膜形貌从孤立的团簇演变为部分合并的蠕虫状结构,接着是渗流形貌,最后形成连续的粗糙薄膜。应用间断合并模型使我们能够评估部分合并的临界平均团簇直径,而Vincent模型的应用则使我们能够量化渗流转变的临界Au/Pd覆盖率。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/316ab5026537/micromachines-11-00410-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/a9f9bb0a6e9b/micromachines-11-00410-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/6affc1f3fb3a/micromachines-11-00410-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/dd1428f15656/micromachines-11-00410-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/0867fa0b0551/micromachines-11-00410-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/198acf89da1c/micromachines-11-00410-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/20afa1171803/micromachines-11-00410-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/1c2ece936886/micromachines-11-00410-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/316ab5026537/micromachines-11-00410-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/a9f9bb0a6e9b/micromachines-11-00410-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/6affc1f3fb3a/micromachines-11-00410-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/dd1428f15656/micromachines-11-00410-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/0867fa0b0551/micromachines-11-00410-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/198acf89da1c/micromachines-11-00410-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/20afa1171803/micromachines-11-00410-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/1c2ece936886/micromachines-11-00410-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2099/7231346/316ab5026537/micromachines-11-00410-g008.jpg

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