Macia Żek Dawid, Kański Micha, Postawa Zbigniew
Smoluchowski Institute of Physics, Jagiellonian University, Łojasiewicza 11, 30-348 Kraków, Poland.
Anal Chem. 2020 May 19;92(10):7349-7353. doi: 10.1021/acs.analchem.0c01219. Epub 2020 May 1.
Topography development is one of the main factors limiting the quality of depth profiles during depth profiling experiments. One possible source of topography development is the formation of self-organized patterns due to cluster ion beam irradiation. In this work, we propose a simple model that can intuitively explain this phenomenon in terms of impact-induced mass transfer. By coupling our model with molecular dynamics simulations, we can predict the critical incidence angle, which separates the smoothening and roughening regimes. The results are in quantitative agreement with experiments. It is observed that the problems arising from topography development during depth profiling with cluster projectiles can be mitigated by reducing the beam incidence angle with respect to the surface normal or increasing its kinetic energy.
形貌演变是限制深度剖析实验中深度剖面质量的主要因素之一。形貌演变的一个可能来源是团簇离子束辐照导致的自组织图案形成。在这项工作中，我们提出了一个简单的模型，该模型可以从碰撞诱导的质量转移角度直观地解释这一现象。通过将我们的模型与分子动力学模拟相结合，我们可以预测区分平滑和粗糙状态的临界入射角。结果与实验定量相符。据观察，在用团簇射弹进行深度剖析时，通过减小束流相对于表面法线的入射角或增加其动能，可以减轻形貌演变带来的问题。
