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利用摄影测量术从扫描电镜图像中提取三维信息。

Extracting Three-dimensional Information from SEM Images by Means of Photogrammetry.

机构信息

Central Institute for Labour Protection, National Research Institute, ul. Czerniakowska 16, 00-701, Warsaw, Poland.

出版信息

Micron. 2020 Jul;134:102873. doi: 10.1016/j.micron.2020.102873. Epub 2020 Apr 17.

DOI:10.1016/j.micron.2020.102873
PMID:32339977
Abstract

Optical photogrammetry software has been applied to scanning electron microscope images to obtain 3D models and quantitative data on carbon particles and graphite nanoparticles. Image acquisition has been automated by the use of external macro software. Mesh data has been reconstructed from a number of images taken at multiple sample stage tilt angles with a supplementary measurement of TEM grids for method validation. This 3D model has been scaled and processed to obtain values such as the volume, height and surface area of the samples and has been quantitatively compared to 2D measurements.

摘要

光学摄影测量软件已应用于扫描电子显微镜图像,以获取关于碳颗粒和石墨纳米颗粒的 3D 模型和定量数据。通过使用外部宏软件实现了图像采集的自动化。使用 TEM 网格进行了补充测量以验证方法,从多个在多个样本台倾斜角度下拍摄的图像中重建了网格数据。对该 3D 模型进行了缩放和处理,以获得样品的体积、高度和表面积等值,并与 2D 测量进行了定量比较。

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