Villarrubia J S, Tondare V N, Vladár A E
Engineering Physics Division, Physical Measurements Laboratory, National Institute of Standards and Technology, Gaithersburg, MD, USA 20899.
Proc SPIE Int Soc Opt Eng. 2016;9778. doi: 10.1117/12.2219777. Epub 2016 Mar 8.
The combination of scanning electron microscopy for high spatial resolution, images from multiple angles to provide 3D information, and commercially available stereo photogrammetry software for 3D reconstruction offers promise for nanometer-scale dimensional metrology in 3D. A method is described to test 3D photogrammetry software by the use of virtual samples-mathematical samples from which simulated images are made for use as inputs to the software under test. The virtual sample is constructed by wrapping a rough skin with any desired power spectral density around a smooth near-trapezoidal line with rounded top corners. Reconstruction is performed with images simulated from different angular viewpoints. The software's reconstructed 3D model is then compared to the known geometry of the virtual sample. Three commercial photogrammetry software packages were tested. Two of them produced results for line height and width that were within close to 1 nm of the correct values. All of the packages exhibited some difficulty in reconstructing details of the surface roughness.
将用于高空间分辨率的扫描电子显微镜、从多个角度获取图像以提供三维信息以及使用市售的立体摄影测量软件进行三维重建相结合，为三维纳米尺度尺寸计量带来了希望。本文描述了一种通过使用虚拟样本（即数学样本，从中生成模拟图像作为被测软件的输入）来测试三维摄影测量软件的方法。虚拟样本是通过将具有任何所需功率谱密度的粗糙表皮包裹在顶部带有圆角的光滑近梯形线上构建而成。从不同角度的视点模拟图像进行重建。然后将软件重建的三维模型与虚拟样本的已知几何形状进行比较。测试了三个商业摄影测量软件包。其中两个软件包对线高和线宽的测量结果与正确值的偏差接近1纳米。所有软件包在重建表面粗糙度细节方面都存在一些困难。
