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具有等离子体天线的锗(锡)纳米岛/硅异质结构光电探测器

Ge(Sn) nano-island/Si heterostructure photodetectors with plasmonic antennas.

作者信息

Schlykow Viktoria, Manganelli Costanza Lucia, Römer Friedhard, Clausen Caterina, Augel Lion, Schulze Jörg, Katzer Jens, Schubert Michael Andreas, Witzigmann Bernd, Schroeder Thomas, Capellini Giovanni, Fischer Inga Anita

机构信息

Peter Grünberg Institute (PGI 10), Forschungszentrum Jülich, Wilhelm-Johnen-Straße, Jülich 52425, Germany. IHP - Leibniz-Institut für innovative Mikroelektronik, Im Technologiepark 25, Frankfurt (Oder) D-15236, Germany.

出版信息

Nanotechnology. 2020 Aug 21;31(34):345203. doi: 10.1088/1361-6528/ab91ef. Epub 2020 May 11.

Abstract

We report on photodetection in deep subwavelength Ge(Sn) nano-islands on Si nano-pillar substrates, in which self-aligned nano-antennas in the Al contact metal are used to enhance light absorption by means of local surface plasmon resonances. The impact of parameters such as substrate doping and device geometry on the measured responsivities are investigated and our experimental results are supported by simulations of the three-dimensional distribution of the electromagnetic fields. Comparatively high optical responsivities of about 0.1 A W are observed as a consequence of the excitation of localized surface plasmons, making our nano-island photodetectors interesting for applications in which size reduction is essential.

摘要

我们报道了在硅纳米柱衬底上的深亚波长锗(锡)纳米岛中的光电探测,其中铝接触金属中的自对准纳米天线通过局部表面等离子体共振来增强光吸收。研究了诸如衬底掺杂和器件几何结构等参数对测量响应度的影响,并且我们的实验结果得到了电磁场三维分布模拟的支持。由于局部表面等离子体的激发,观察到了约0.1 A/W的相对较高的光响应度,这使得我们的纳米岛光电探测器对于尺寸减小至关重要的应用很有吸引力。

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