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基于氮化镓的绿色激光二极管中衬底模式的抑制

Suppression of substrate mode in GaN-based green laser diodes.

作者信息

Jiang Lingrong, Liu Jianping, Zhang Liqun, Qiu Bocang, Tian Aiqin, Hu Lei, Li Deyao, Huang Siyi, Zhou Wei, Ikeda Masao, Yang Hui

出版信息

Opt Express. 2020 May 11;28(10):15497-15504. doi: 10.1364/OE.389880.

DOI:10.1364/OE.389880
PMID:32403576
Abstract

Parasitic substrate mode readily appears in GaN-based laser diodes (LDs) because of insufficient optical confinement, especially for green LDs. Substrate modes affect the behavior of a LD severely, including the laser beam quality, the optical output power, the longitudinal mode stability, and the maximum modulation speed. In this article, systematic studies on the n-cladding layer (CL) design to suppress the substrate mode of GaN-based green LDs were carried out. We established a contour map to describe the relationship between the optical confinement (determined by the thickness and the refractive index) of n-CL and the substrate mode intensity by simulating the near-field pattern and the far-field pattern. We found that it was difficult to obtain the Gaussian-shape far-field pattern using AlGaN as a cladding layer due to the appearance of cracks induced by tensile strain. However, this can be realized by introducing quaternary AlInGaN as a cladding layer since refractive index and strain can be tuned separately for quaternary alloy.

摘要

由于光限制不足,寄生衬底模式很容易出现在基于氮化镓的激光二极管(LD)中,尤其是对于绿色激光二极管。衬底模式严重影响激光二极管的性能,包括激光束质量、光输出功率、纵向模式稳定性和最大调制速度。在本文中,我们对用于抑制基于氮化镓的绿色激光二极管衬底模式的n型包层(CL)设计进行了系统研究。通过模拟近场图案和远场图案,我们建立了一个等高线图来描述n型包层的光限制(由厚度和折射率决定)与衬底模式强度之间的关系。我们发现,由于拉伸应变引起的裂纹出现,使用AlGaN作为包层很难获得高斯形状的远场图案。然而,通过引入四元AlInGaN作为包层可以实现这一点,因为对于四元合金,折射率和应变可以分别进行调整。

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引用本文的文献

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Improving Output Efficiency of InGaN-Based MQW Green Laser Diodes by Modulating Indium Content of Quantum Barriers and Using Composite Lower Waveguide Layers.通过调制量子势垒的铟含量和使用复合下波导层提高基于氮化铟镓的多量子阱绿色激光二极管的输出效率。
Nanomaterials (Basel). 2022 Jul 27;12(15):2581. doi: 10.3390/nano12152581.