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用于减小波长转换系统光学扩展量的分布式布拉格反射器的设计、制造与表征

Design, fabrication and characterization of a distributed Bragg reflector for reducing the étendue of a wavelength converting system.

作者信息

Gao Boxuan, George John Puthenparampil, Beeckman Jeroen, Neyts Kristiaan

出版信息

Opt Express. 2020 Apr 27;28(9):12837-12846. doi: 10.1364/OE.391080.

DOI:10.1364/OE.391080
PMID:32403772
Abstract

In this work, the design, fabrication and characterization are reported for a distributed Bragg reflector (DBR) filter with a specific wavelength and angular dependency, which aims to improve the light collection from a wavelength-converter-based light source into a smaller angle than the full angle Lambertian emission. The desired design is obtained by optimizing the transmission characteristics of a multi-layer structure. Titania (TiO) and silica (SiO) are used as high and low refractive index materials, respectively. The deposition is made by electron beam evaporation without substrate heating, followed by a post-annealing procedure. The optical properties of the evaporated layers are analyzed by ellipsometer and spectrometer measurements. The angular and wavelength dependency of the fabricated DBR is in good agreement with simulations for the designed structure.

摘要

在本工作中,报道了一种具有特定波长和角度依赖性的分布式布拉格反射器(DBR)滤波器的设计、制造和表征,其目的是将基于波长转换器的光源的光收集到比全角朗伯发射更小的角度范围内。通过优化多层结构的传输特性获得所需的设计。分别使用二氧化钛(TiO)和二氧化硅(SiO)作为高折射率和低折射率材料。通过电子束蒸发在不加热衬底的情况下进行沉积,随后进行后退火程序。通过椭偏仪和光谱仪测量分析蒸发层的光学性质。所制造的DBR的角度和波长依赖性与设计结构的模拟结果吻合良好。

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