Fang Mei, Li Tianli, Zhang Sangjian, Rao K V, Belova Lyubov
Hunan Key Laboratory of Super Microstructure and Ultrafast Process, School of Physics and Electronics, Central South University, Changsha, Hunan 410083, People's Republic of China.
Department of Materials Science and Engineering, KTH-Royal Institute of Technology, Stockholm SE10044, Sweden.
R Soc Open Sci. 2020 Apr 15;7(4):200242. doi: 10.1098/rsos.200242. eCollection 2020 Apr.
Inkjet printing has become a promising, efficient, inexpensive, scalable technique for materials deposition, mask-less and digital patterning in many device applications. Meanwhile, the ink preparation remains a challenge especially for printing functional oxide materials. Based on the principles of inkjet printing (especially relevant for piezoelectric drop-on-demand inkjet printer) and the process of the conversion of liquid ink into solid thin films of oxide materials, we present two approaches to the design and tailoring of inks: (i) oxide particle suspensions (e.g. SiO, TiO, FeO) and (ii) metal-acetates precursor solutions for directly printing oxide thin films (e.g. ZnO, MgO, ITO and so forth). The solution inks are stable and produce tunable oxide films with high density and smooth surface. For some of the inks containing multi-type acetates with possible phase separation even before calcinations, we have developed a chelating procedure in order to tailor the films into single-phase homogeneity. The work lays a foundation for inkjet printing of oxides films for functional applications in electronic, photonic and energy devices.
喷墨打印已成为一种有前景、高效、廉价且可扩展的技术,用于许多器件应用中的材料沉积、无掩膜和数字图案化。与此同时,墨水制备仍然是一个挑战,尤其是对于打印功能性氧化物材料而言。基于喷墨打印原理(特别是与压电按需喷墨打印机相关)以及液体墨水转化为氧化物材料固体薄膜的过程,我们提出了两种设计和定制墨水的方法:(i)氧化物颗粒悬浮液(例如SiO、TiO、FeO)和(ii)用于直接打印氧化物薄膜(例如ZnO、MgO、ITO等)的金属醋酸盐前驱体溶液。溶液墨水稳定,可制备出具有高密度和光滑表面的可调谐氧化物薄膜。对于一些甚至在煅烧前就可能发生相分离的含多种醋酸盐的墨水,我们开发了一种螯合程序,以便将薄膜定制为单相均匀性。这项工作为在电子、光子和能量器件中进行功能性应用的氧化物薄膜喷墨打印奠定了基础。