A New Design of a Thin-Film Thermoelectric Device Based on Multilayer-Structure Module.

In this work, a novel multilayer structure thin-film thermoelectric device is proposed for preparing a high performance generator. The result shows that the output voltage of the three-layer thin-film device has a linear increasing trend with the increasing temperature difference. Additionally, the device was also tested as a laser power measurement and displays that it has good sensitivity. Moreover, we also fabricated the multilayer device based on the present three-layer structure. It improves upon the similar output prosperities, confirming that the present multilayer structure thin-film thermoelectric device can be considered for preparing high performance micro-self-powered sources and sensors.