Makela Megan, Gordon Paul, Tu Dandan, Soliman Cyril, Coté Gerard L, Maitland Kristen, Lin Pao Tai
Anal Chem. 2020 Jul 7;92(13):8917-8922. doi: 10.1021/acs.analchem.0c00809. Epub 2020 Jun 15.
Raman spectroscopy using aluminum nitride (AlN) optical waveguides was demonstrated for organic compound analysis. The AlN waveguide device was prepared by reactive sputtering deposition and complementary-metal-oxide semiconductor (CMOS) processes. A fundamental waveguide mode was observed over a broad visible spectrum and the waveguide evanescent wave was used to excite the Raman signals of the test analytes. The performance of the waveguide sensor was characterized by measuring the Raman spectra of the benzene derivative mixtures consisting of benzene, anisole, and toluene. The compositions and concentrations were resolved by correlating the obtained Raman spectrum with the characteristic Raman peaks associated with C-C, C-H, and C-O functional groups. With the advantages of real-time detection and enhanced Raman signal intensity, the AlN waveguides provided a sensor platform for nondestructive and online chemical compound monitoring.
已证明使用氮化铝（AlN）光波导的拉曼光谱可用于有机化合物分析。AlN波导器件通过反应溅射沉积和互补金属氧化物半导体（CMOS）工艺制备。在宽可见光谱范围内观察到了基本波导模式，并使用波导倏逝波激发测试分析物的拉曼信号。通过测量由苯、苯甲醚和甲苯组成的苯衍生物混合物的拉曼光谱来表征波导传感器的性能。通过将获得的拉曼光谱与与C-C、C-H和C-O官能团相关的特征拉曼峰相关联，解析了成分和浓度。由于具有实时检测和增强拉曼信号强度的优点，AlN波导为无损和在线化合物监测提供了一个传感器平台。
