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基于 Zeta 电位的大区域纳米球光刻自组装

Zeta Potential Dependent Self-Assembly for Very Large Area Nanosphere Lithography.

机构信息

Department of Electrical and Computer Engineering, The University of Texas at Austin, 10100 Burnet Road, Building 160, Austin, Texas 78758, United States.

出版信息

Nano Lett. 2020 Jul 8;20(7):5090-5096. doi: 10.1021/acs.nanolett.0c01277. Epub 2020 Jun 2.

DOI:10.1021/acs.nanolett.0c01277
PMID:32463243
Abstract

Nanosphere lithography offers a rapid, low-cost approach for patterning of large-area two-dimensional periodic nanostructures. However, a complete understanding of the nanosphere self-assembly process is necessary to enable further development and scaling of this technology. The self-assembly of nanospheres into two-dimensional periodic arrays has previously been attributed solely to the Marangoni force; however, we demonstrate that the ζ potential of the nanosphere solution is critically important for successful self-assembly to occur. We discuss and demonstrate how this insight can be used to greatly increase self-assembled 2D periodic array areas while decreasing patterning time and cost. As a representative application, we fabricate antireflection nanostructures on a transparent flexible polymer substrate suitable for use as a large-area (270 cm), broadband, omnidirectional antireflection film.

摘要

纳米球光刻技术为大面积二维周期性纳米结构的图案化提供了一种快速、低成本的方法。然而,为了进一步发展和扩大这项技术,需要对纳米球自组装过程有一个完整的理解。纳米球自组装成二维周期性阵列以前仅归因于马兰戈尼力;然而,我们证明了纳米球溶液的 ζ 势对于成功的自组装至关重要。我们讨论并展示了如何利用这一见解来大大增加二维周期性阵列的自组装面积,同时减少图案化时间和成本。作为一个代表性的应用,我们在透明的柔性聚合物衬底上制造抗反射纳米结构,适用于大面积(270cm)、宽带、全向抗反射膜。

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Zeta Potential Dependent Self-Assembly for Very Large Area Nanosphere Lithography.基于 Zeta 电位的大区域纳米球光刻自组装
Nano Lett. 2020 Jul 8;20(7):5090-5096. doi: 10.1021/acs.nanolett.0c01277. Epub 2020 Jun 2.
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Moiré Nanosphere Lithography.Moiré 纳米球光刻技术。
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Self-assembly and nanosphere lithography for large-area plasmonic patterns on graphene.用于石墨烯上大面积等离子体图案的自组装和纳米球光刻技术。
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Recent developments in the fabrication of ordered nanostructure arrays based on nanosphere lithography.基于纳米球光刻技术的有序纳米结构阵列制造的最新进展。
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Multiple Linear Regression Modeling of Nanosphere Self-Assembly Spin Coating.纳米球自组装旋涂的多元线性回归建模
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Fabrication of flexible highly ordered porous alumina templates by combined nanosphere lithography and anodization.采用纳米球光刻和阳极氧化相结合的方法制备柔性有序大孔氧化铝模板。
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Micromachines (Basel). 2021 Jan 23;12(2):119. doi: 10.3390/mi12020119.

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