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使用在线 LASIL-ICP-MS 对结构化复杂金属氧化物薄膜进行定量成像。

Quantitative imaging of structured complex metal oxide thin films using online-LASIL-ICP-MS.

机构信息

TU Wien, Institute of Chemical Technologies and Analytics, Vienna, Austria.

TU Wien, Joint Workshop, Technical Chemistry, Vienna, Austria.

出版信息

Talanta. 2020 Sep 1;217:121012. doi: 10.1016/j.talanta.2020.121012. Epub 2020 Apr 18.

DOI:10.1016/j.talanta.2020.121012
PMID:32498899
Abstract

Online-laser ablation of solids in liquid (online-LASIL) coupled with ICP-MS detection was used as a new sampling strategy for the analysis of complex metal oxide (CMO) thin films. The in-house built and optimized online-LASIL ablation cell provides the unique possibility to correlate the signal intensities with the spatial origin of the signal at the sample. For that purpose a particle transport with as little particle dispersion as possible is crucial. To demonstrate the 2D imaging capability of this technique, geometrically structured samples with varying composition were prepared by pulsed laser deposition (PLD) and ion beam etching procedures. These thin films with a thickness of 220 nm were spatially resolved analysed. As a result, 2D intensity maps obtained by online-LASIL can be reported for the first time. Additionally a new approach for simultaneous online quantification was developed by adopting the standard addition concept allowing to correct for instrumental drifts of long time measurements.

摘要

在线激光烧蚀液体中的固体(online-LASIL)与 ICP-MS 检测相结合,被用作分析复杂金属氧化物(CMO)薄膜的一种新的采样策略。内部构建和优化的在线 LASIL 烧蚀池提供了独特的可能性,可以将信号强度与样品上信号的空间起源相关联。为此,尽可能减少颗粒分散的颗粒输送至关重要。为了证明该技术的 2D 成像能力,通过脉冲激光沉积(PLD)和离子束刻蚀程序制备了具有不同组成的几何结构样品。对这些厚度为 220nm 的薄膜进行了空间分辨分析。结果,可以首次报告通过 online-LASIL 获得的 2D 强度图。此外,通过采用标准添加概念,开发了一种新的同时在线定量方法,允许对长时间测量的仪器漂移进行校正。

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