Kim Eunhyun, Kim Jinuk, Ha Seonggyun, Song Changsik, Kim Joo-Hyung
INHA Institute of Space Science and Technology (INHA IST) and Lab. of Intelligent Devices and Thermal Control, Department of Mechanical Engineering, Inha University, Incheon 22212, South Korea.
Department of Chemistry, Sungkyunkwan University, Suwon 16419, South Korea.
J Nanosci Nanotechnol. 2020 Nov 1;20(11):7145-7150. doi: 10.1166/jnn.2020.18850.
The effects of a plasma treatment on the sensing performance of surface acoustic wave (SAW) sensors to detect chemical warfare agents (CWAs) were investigated. SAW sensors designed for an operating frequency of 250 MHz were fabricated using lift-off techniques followed by the deposition of a very thin thiourea (TU) layer as a sensing film on the sensing area of the SAW sensor. To achieve some advantages from the plasma treatment on the surface, such as cleaning, surface activation and modification, a post-plasma treatment was performed on the sensing layer and the sensing performance of the SAW sensor was measured by a comparison with the measured responses, providing different simulant gases through the gas feeding system. The sensitivity test revealed significant improvement in the sensing ability of the SAW sensor to detect DMMP, a simulant of a CWA, but with a relatively longer recovery time. The responses of other simulants at different concentrations and different simulant vapors were compared. The results showed that a plasma treatment on the sensing layer of a SAW device can improve the selectivity and sensitivity to a certain target gas or some volatile organic compounds. Therefore, a plasma treatment will be very useful for improving the selectivity and sensitivity of SAW sensors for the detection of CWAs.
研究了等离子体处理对用于检测化学战剂（CWA）的表面声波（SAW）传感器传感性能的影响。采用剥离技术制造了工作频率为250MHz的SAW传感器，随后在SAW传感器的传感区域沉积了一层非常薄的硫脲（TU）膜作为传感膜。为了从表面的等离子体处理中获得一些优势，如清洁、表面活化和改性，对传感层进行了等离子体后处理，并通过与通过气体进料系统提供不同模拟气体时的测量响应进行比较，来测量SAW传感器的传感性能。灵敏度测试表明，SAW传感器检测化学战剂模拟物DMMP的传感能力有显著提高，但恢复时间相对较长。比较了其他模拟物在不同浓度和不同模拟物蒸汽下的响应。结果表明，对SAW器件的传感层进行等离子体处理可以提高对特定目标气体或某些挥发性有机化合物的选择性和灵敏度。因此，等离子体处理对于提高SAW传感器检测化学战剂的选择性和灵敏度将非常有用。
