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基于图案化氮化铝薄膜的高密度压电微机械超声换能器阵列的研制

Development of a High-Density Piezoelectric Micromachined Ultrasonic Transducer Array Based on Patterned Aluminum Nitride Thin Film.

作者信息

Shin Eunjung, Yeo Hong Goo, Yeon Ara, Jin Changzhu, Park Wonki, Lee Sung-Chul, Choi Hongsoo

机构信息

Department of Robotics Engineering, Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea.

DGIST-ETH Microrobotics Research Center (DE-MRC), Daegu Gyeongbuk Institute of Science & Technology (DGIST), Daegu 42988, Korea.

出版信息

Micromachines (Basel). 2020 Jun 26;11(6):623. doi: 10.3390/mi11060623.

DOI:10.3390/mi11060623
PMID:32604827
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC7345422/
Abstract

This study presents the fabrication and characterization of a piezoelectric micromachined ultrasonic transducer (pMUT; radius: 40 µm) using a patterned aluminum nitride (AlN) thin film as the active piezoelectric material. A 20 × 20 array of pMUTs using a 1 µm thick AlN thin film was designed and fabricated on a 2 × 2 mm footprint for a high fill factor. Based on the electrical impedance and phase of the pMUT array, the electromechanical coefficient was ~1.7% at the average resonant frequency of 2.82 MHz in air. Dynamic displacement of the pMUT surface was characterized by scanning laser Doppler vibrometry. The pressure output while immersed in water was 19.79 kPa when calculated based on the peak displacement at the resonant frequency. The proposed AlN pMUT array has potential applications in biomedical sensing for healthcare, medical imaging, and biometrics.

摘要

本研究展示了一种压电微机械超声换能器（pMUT；半径：40 µm）的制造与特性，该换能器使用图案化的氮化铝（AlN）薄膜作为有源压电材料。为实现高填充因子，设计并制造了一个采用1 µm厚AlN薄膜的20×20 pMUT阵列，其占地面积为2×2 mm。基于pMUT阵列的电阻抗和相位，在空气中平均谐振频率2.82 MHz时，机电系数约为1.7%。通过扫描激光多普勒测振法对pMUT表面的动态位移进行了表征。根据谐振频率下的峰值位移计算，浸入水中时的压力输出为19.79 kPa。所提出的AlN pMUT阵列在医疗保健的生物医学传感、医学成像和生物识别方面具有潜在应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/ed4290e413b6/micromachines-11-00623-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/9dceb7b02534/micromachines-11-00623-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/8c361b652cb3/micromachines-11-00623-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/16013017addc/micromachines-11-00623-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/c86890003777/micromachines-11-00623-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/0ce1389594d0/micromachines-11-00623-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/b5022a1b01a1/micromachines-11-00623-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/16cb35663150/micromachines-11-00623-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/e008b8ba7e4c/micromachines-11-00623-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/803a3992de46/micromachines-11-00623-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/ed4290e413b6/micromachines-11-00623-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/9dceb7b02534/micromachines-11-00623-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/8c361b652cb3/micromachines-11-00623-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/16013017addc/micromachines-11-00623-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/c86890003777/micromachines-11-00623-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/0ce1389594d0/micromachines-11-00623-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/b5022a1b01a1/micromachines-11-00623-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/16cb35663150/micromachines-11-00623-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/e008b8ba7e4c/micromachines-11-00623-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/803a3992de46/micromachines-11-00623-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/636e/7345422/ed4290e413b6/micromachines-11-00623-g010.jpg

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