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使用钯掺杂的 SnO 厚膜气体传感器研究乙醇气体的结构和传感性能。

Structural and sensing properties of ethanol gas using Pd-doped SnO thick film gas sensor.

机构信息

Thin Film Laboratory, Department of Physics, Deen Dayal Upadhyaya Gorakhpur University, Gorakhpur, Uttar-Pradesh, 273009, India.

出版信息

Environ Sci Pollut Res Int. 2021 Jan;28(4):3920-3927. doi: 10.1007/s11356-020-10211-6. Epub 2020 Jul 23.

Abstract

In the present study, we fabricate undoped and 1 wt% palladium (Pd)-doped tin oxide (SnO) films were deposited on alumina substrate using screen printing technology. The deposited sensing film is characterized and its microstructural properties are studied using X-ray diffraction (XRD) and atomic force microscope (AFM). The crystallite size, grain size, and roughness parameter decrease with Pd doping. It was ~ 23.5 nm and ~ 19.2 nm for undoped and Pd-doped SnO film samples. The response of fabricated thick film sensor for 1 wt% Pd-doped SnO is maximum (~ 71) with varying concentrations of ethanol (5000 ppm) at operating temperature 473 K. The response/recovery time is observed and it is ~ 41 s/125 s. The reduction in crystallinity and roughness leads to improves sensing behavior towards ethanol gas. The sensing mechanism and response behavior is explained based on a theoretical model.

摘要

在本研究中,我们使用丝网印刷技术在氧化铝衬底上制备了未掺杂和 1wt%钯(Pd)掺杂的氧化锡(SnO)薄膜。通过 X 射线衍射(XRD)和原子力显微镜(AFM)对沉积的传感薄膜进行了表征,并研究了其微观结构特性。随着 Pd 的掺杂,晶粒尺寸、晶粒尺寸和粗糙度参数减小。未掺杂和 Pd 掺杂 SnO 薄膜样品的晶粒尺寸分别约为 23.5nm 和 19.2nm。在工作温度为 473K 时,对于 1wt%Pd 掺杂 SnO 制成的厚膜传感器,在不同浓度的乙醇(5000ppm)下,其响应最大(约 71)。响应/恢复时间约为 41s/125s。结晶度和粗糙度的降低导致对乙醇气体的传感性能得到改善。基于理论模型解释了传感机制和响应行为。

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